Semiconductor device and method for manufacturing the semiconductor device

ABSTRACT

When an oxide semiconductor film is microfabricated to have an island shape, with the use of a hard mask, unevenness of an end portion of the oxide semiconductor film can be suppressed. Specifically, a hard mask is formed over the oxide semiconductor film, a resist is formed over the hard mask, light exposure is performed to form a resist mask, the hard mask is processed using the resist mask as a mask, the oxide semiconductor film is processed using the processed hard mask as a mask, the resist mask and the processed hard mask are removed, a source electrode and a drain electrode are formed in contact with the processed oxide semiconductor film, a gate insulating film is formed over the source electrode and the drain electrode, and a gate electrode is formed over the gate insulating film, the gate electrode overlapping with the oxide semiconductor film.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to products (including machines,manufactures, and compositions of matters) and processes (includingsimple methods and production methods). In particular, one embodiment ofthe present invention relates to a semiconductor device, a displaydevice, a light-emitting device, a power storage device, a drivingmethod thereof, or a manufacturing method thereof. In particular, oneembodiment of the present invention relates to a semiconductor device, adisplay device, or a light-emitting device each including an oxidesemiconductor.

2. Description of the Related Art

Transistors used for most flat panel displays typified by a liquidcrystal display device or a light-emitting display device are formedusing a silicon semiconductor such as amorphous silicon, single crystalsilicon, or polycrystalline silicon provided over a glass substrate.Further, such a transistor employing such a silicon semiconductor isused in integrated circuits (ICs) and the like.

In recent years, attention has been drawn to a technique in which,instead of a silicon semiconductor, a metal oxide exhibitingsemiconductor characteristics is used in transistors. Note that in thisspecification, a metal oxide exhibiting semiconductor characteristics isreferred to as an oxide semiconductor.

For example, a transistor formed using zinc oxide or an In—Ga—Zn-basedoxide as an oxide semiconductor is disclosed (see Patent Document 1).

REFERENCE

-   [Patent Document 1] Japanese Published Patent Application No.    2006-165528

SUMMARY OF THE INVENTION

In order to achieve high-speed operation, low power consumption, highintegration, or the like of a transistor, it is necessary to miniaturizea transistor.

However, it is concerned that a yield of transistors in themanufacturing process is decreased due to miniaturization thereof. Forexample, when an oxide semiconductor film which serves as a channel ismicrofabricated to have an island shape, unevenness may be generated atan end portion of the oxide semiconductor film, which might cause anincrease in variations in the shape of the oxide semiconductor film andbring about an adverse effect on electrical characteristics orreliability of the transistor.

Therefore, an object of one embodiment of the present invention is toprovide a miniaturized transistor or the like having favorableelectrical characteristics in a high yield.

Further, another object of one embodiment of the present invention is toachieve high performance, high reliability, and high productivity alsoin a semiconductor device or the like including the transistor.

Another object of one embodiment of the present invention is to providea novel semiconductor device or the like. Another object of oneembodiment of the present invention is to provide a novel method formanufacturing a novel semiconductor device or the like. Note that thedescriptions of these objects do not disturb the existence of otherobjects. In one embodiment of the present invention, there is no need toachieve all the objects. Other objects will be apparent from and can bederived from the description of the specification, the drawings, theclaims, and the like.

In one embodiment of the present invention, when an oxide semiconductorfilm is microfabricated to have an island shape, with the use of a hardmask, unevenness of an end portion of the oxide semiconductor film canbe suppressed. Further, a channel length can be shortened, with the useof a resist mask having a small line width, which is formed by exposinga resist to light using electron beam exposure, liquid immersionexposure, or the like. The specific structure and manufacturing methodare described below.

One embodiment of the present invention is a semiconductor deviceincluding an oxide semiconductor film over an insulating surface; asource electrode and a drain electrode which are in contact with theoxide semiconductor film; a gate insulating film over the sourceelectrode and the drain electrode; and a gate electrode over the gateinsulating film, the gate electrode overlapping with the oxidesemiconductor film, in which a distance between the source electrode andthe drain electrode is greater than or equal to 1 nm and less than orequal to 30 nm, and in which a standard deviation of line edge roughnessof the oxide semiconductor film is less than or equal to 4 nm.

Further, in the above structure, the semiconductor device includes afirst oxide film and a second oxide film between which the oxidesemiconductor film is positioned, in which an energy of a bottom of aconduction band in each of the first oxide film and the second oxidefilm is closer to a vacuum level than an energy of a bottom of aconduction band in the oxide semiconductor film by 0.05 eV or higher and2 eV or lower.

Further, in the above structure, the semiconductor device includes afirst low-resistance region between the oxide semiconductor film and thesource electrode and a second low-resistance region between the oxidesemiconductor film and the drain electrode.

Further, one embodiment of the present invention is a method formanufacturing a semiconductor device, which includes the followingsteps: an oxide semiconductor film is deposited over an insulatingsurface; a hard mask is formed over the oxide semiconductor film; aresist is formed over the hard mask; light exposure is performed to forma resist mask; the hard mask is processed using the resist mask as amask; the resist mask is removed; the oxide semiconductor film isprocessed using the processed hard mask as a mask; the processed hardmask is removed; a source electrode and a drain electrode which are incontact with the processed oxide semiconductor film are formed; a gateinsulating film is formed over the source electrode and the drainelectrode; and a gate electrode is formed over the gate insulating film,the gate electrode overlapping with the oxide semiconductor film.

Further, one embodiment of the present invention is a method formanufacturing a semiconductor device, which includes the followingsteps: an oxide semiconductor film is deposited over an insulatingsurface; a hard mask is formed over the oxide semiconductor film; anorganic coating film is formed over the hard mask; a resist is formedover the organic coating film; light exposure is performed to form aresist mask; the organic coating film and the hard mask are processedusing the resist mask as a mask; the resist mask and the processedorganic coating film are removed; the oxide semiconductor film isprocessed using the processed hard mask as a mask; the processed hardmask is removed; a source electrode and a drain electrode which are incontact with the processed oxide semiconductor film are formed; a gateinsulating film is formed over the source electrode and the drainelectrode; and a gate electrode is formed over the gate insulating film,the gate electrode overlapping with the oxide semiconductor film.

Further, in the above manufacturing method, the light exposure iselectron beam exposure or liquid immersion exposure.

Note that in this specification, a hard mask refers to a mask formedusing a material (a metal material or an insulating material) other thana material of a resist.

Further, in this specification, line edge roughness refers to thedeviation of a resist pattern edge from its ideal line.

With the above structure, a miniaturized transistor having highelectrical characteristics can be provided in a high yield.

Further, with the above structure, also in a semiconductor deviceincluding the transistor, high performance, high reliability, and highproductivity can be achieved.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are a plan view and a cross-sectional view illustratinga semiconductor device of one embodiment of the present invention.

FIGS. 2A to 2D are cross-sectional views illustrating a method formanufacturing a semiconductor device of one embodiment of the presentinvention.

FIGS. 3A to 3D are cross-sectional views illustrating a method formanufacturing a semiconductor device of one embodiment of the presentinvention.

FIGS. 4A to 4C are a plan view and cross-sectional views illustrating asemiconductor device of one embodiment of the present invention.

FIGS. 5A to 5D are cross-sectional views illustrating a method formanufacturing a semiconductor device of one embodiment of the presentinvention.

FIGS. 6A to 6D are cross-sectional views illustrating a method formanufacturing a semiconductor device of one embodiment of the presentinvention.

FIG. 7 is a cross-sectional view illustrating a semiconductor device ofone embodiment of the present invention.

FIGS. 8A and 8B are a cross-sectional view and a circuit diagram of asemiconductor device.

FIGS. 9A and 9B are a circuit diagram and a perspective view of asemiconductor device.

FIG. 10 is a block diagram of a semiconductor device.

FIG. 11 is a cross-sectional view of a semiconductor device.

FIGS. 12A to 12C are block diagrams of a semiconductor device.

FIGS. 13A to 13C illustrate electronic appliances to which asemiconductor device can be applied.

FIGS. 14A and 14B are SEM images of samples fabricated in Example.

FIG. 15 illustrates a liquid immersion exposure apparatus.

FIG. 16 illustrates an aperture angle of a lens.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments are described in detail with reference to drawings. Notethat the present invention is not limited to the following descriptionand it will be readily appreciated by those skilled in the art thatmodes and details can be modified in various ways without departing fromthe spirit and the scope of the present invention. Therefore, thepresent invention should not be limited to the descriptions of theembodiments below. Note that in structures of the present inventiondescribed below, the same portions or portions having similar functionsare denoted by the same reference numerals in different drawings, anddescription thereof is not repeated in some cases.

Note that functions of a “source” and a “drain” of a transistor aresometimes replaced with each other when a transistor of oppositepolarity is used or when the direction of current flowing is changed incircuit operation, for example. Therefore, the terms “source” and“drain” can be replaced with each other in this specification.

In this specification, the term “parallel” indicates that the anglebetween two straight lines is greater than or equal to −10° and lessthan or equal to 10°, and accordingly includes the case where the angleis greater than or equal to −5° and less than or equal to 5°. Inaddition, the term “perpendicular” indicates that the angle formedbetween two straight lines is greater than or equal to 80° and less thanor equal to 100°, and accordingly includes the case where the angle isgreater than or equal to 85° and less than or equal to 95°.

In this specification, trigonal and rhombohedral crystal systems areincluded in a hexagonal crystal system.

Embodiment 1

In this embodiment, a transistor which is a semiconductor device of oneembodiment of the present invention is described with reference todrawings.

FIGS. 1A and 1B are a top view and a cross-sectional view of atransistor 150 of one embodiment of the present invention. FIG. 1A isthe top view, and a cross section taken along a dashed-dotted line A1-A2in FIG. 1A is illustrated in FIG. 1B. Note that for simplification ofthe drawing, some components in the top view in FIG. 1A are notillustrated.

The transistor 150 illustrated in FIGS. 1A and 1B includes a baseinsulating film 102 over a substrate 100, an oxide semiconductor film104 over the base insulating film 102, a low-resistance region 105 a anda low-resistance region 105 b in upper portions of the oxidesemiconductor film 104, a source electrode 106 a in contact with thelow-resistance region 105 a, a drain electrode 106 b in contact with thelow-resistance region 105 b, a gate insulating film 108 over the oxidesemiconductor film 104, the source electrode 106 a, and the drainelectrode 106 b, and a gate electrode 110 over the gate insulating film108. In addition, an insulating film 112 may be provided over the gateinsulating film 108 and the gate electrode 110. Note that the insulatingfilm 112 is provided as needed and another insulating film may befurther provided thereover.

There is no large limitation on the substrate 100. For example, a glasssubstrate, a ceramic substrate, a quartz substrate, or a sapphiresubstrate may be used as the substrate 100. Alternatively, a singlecrystal semiconductor substrate or a polycrystalline semiconductorsubstrate made of silicon, silicon carbide, or the like, a compoundsemiconductor substrate made of silicon germanium or the like, asilicon-on-insulator (SOI) substrate, or the like may be used as thesubstrate 100. Still alternatively, any of these substrates providedwith a semiconductor element may be used as the substrate 100.

In the case of using a large glass substrate such as the fifthgeneration (1000 mm×1200 mm or 1300 mm×1500 mm); the sixth generation(1500 mm×1800 mm); the seventh generation (1870 mm×2200 mm); the eighthgeneration (2200 mm×2500 mm); the ninth generation (2400 mm×2800 mm); orthe tenth generation (2880 mm×3130 mm) as the substrate 100, in somecases, microfabrication is difficult due to the shrinkage of thesubstrate 100, which is caused by heat treatment or the like in amanufacturing process of the semiconductor device. Therefore, in thecase where the above-described large glass substrate is used as thesubstrate 100, a substrate which is unlikely to shrink through the heattreatment is preferably used. For example, as the substrate 100, it ispossible to use a large glass substrate in which the amount of shrinkageafter heat treatment which is performed for an hour at 400° C.,preferably 450° C., further preferably 500° C. is less than or equal to10 ppm, preferably less than or equal to 5 ppm, further preferably lessthan or equal to 3 ppm.

Still alternatively, a flexible substrate may be used as the substrate100. As a method of providing a transistor over a flexible substrate,there is a method in which a transistor is formed over a non-flexiblesubstrate, and then the transistor is separated and transferred to thesubstrate 100 which is a flexible substrate. In that case, a separationlayer is preferably provided between the non-flexible substrate and thetransistor.

The base insulating film 102, from which oxygen is released by heattreatment, has a function of supplying the oxygen to the oxidesemiconductor film as well as a function of preventing diffusion of animpurity from the substrate 100; thus, the base insulating film 102 ispreferably an insulating film containing oxygen, further preferably aninsulating film containing excess oxygen. Note that in the case wherethe substrate 100 is a substrate where another device is formed asdescribed above, the base insulating film 102 has also a function as aninterlayer insulating film. In that case, the base insulating film 102is preferably subjected to planarization treatment such as chemicalmechanical polishing (CMP) treatment so as to have a flat surface.

As the base insulating film 102, for example, a single layer selectedfrom a silicon oxide film, a gallium oxide film, a zinc oxide film, analuminum oxide film, a gallium zinc oxide film, a silicon nitride film,a silicon oxynitride film, an aluminum oxynitride film, and a siliconnitride oxide film or a stack of any of these films can be used.

Here, a film from which oxygen is released by heat treatment may releaseoxygen, the amount of which is higher than or equal to 1×10¹⁸ atoms/cm³,higher than or equal to 1×10¹⁹ atoms/cm³, or higher than or equal to1×10²⁰ atoms/cm³ (converted into the number of oxygen atoms) in TDSanalysis in which heat treatment is performed such that a temperature ofa film surface is higher than or equal to 100° C. and lower than orequal to 700° C., preferably higher than or equal to 100° C. and lowerthan or equal to 500° C.

Further, the film from which oxygen is released by heat treatment maycontain a peroxide radical. Specifically, the spin density attributed toa peroxide radical is 5×10¹⁷ spins/cm³ or higher. Note that the filmcontaining a peroxide radical may have an asymmetric signal at a gfactor of around 2.01 generated in ESR.

The insulating film containing excess oxygen may be oxygen-excesssilicon oxide (SiO_(X) (X>2)). In the oxygen-excess silicon oxide(SiO_(X) (X>2)), the number of oxygen atoms per unit volume is more thantwice the number of silicon atoms per unit volume. The number of siliconatoms and the number of oxygen atoms per unit volume are measured byRutherford backscattering spectrometry (RBS).

The oxide semiconductor film 104 is an oxide semiconductor filmincluding at least indium. The oxide semiconductor film 104 may includezinc in addition to indium, for example.

The concentration of silicon in the oxide semiconductor film 104 isdescribed below. In order to obtain stable electrical characteristics ofa transistor, it is effective to reduce the concentration of impuritiesin the oxide semiconductor film 104 so that the oxide semiconductor film104 becomes intrinsic or substantially intrinsic. Specifically, thecarrier density of the oxide semiconductor film is preferably set tolower than 1×10¹⁷/cm³, lower than 1×10¹⁵/cm³, or lower than 1×10¹³/cm³.In the oxide semiconductor film, a light element, a semimetal element, ametal element, and the like (lower than 1 atomic %), other than maincomponents serve as impurities. For example, hydrogen, nitrogen, carbon,silicon, and germanium serve as impurities in the oxide semiconductorfilm.

Further, in the oxide semiconductor film 104, hydrogen and nitrogengenerate a donor level, and increase the carrier density. Theconcentration of hydrogen in the oxide semiconductor film 104, which ismeasured by secondary ion mass spectrometry (SIMS), is set to lower thanor equal to 2×10²⁰ atoms/cm³, preferably lower than or equal to 5×10¹⁹atoms/cm³, further preferably lower than or equal to 1×10¹⁹ atoms/cm³,still further preferably lower than or equal to 5×10¹⁸ atoms/cm³. Theconcentration of nitrogen in the oxide semiconductor film 104, which ismeasured by SIMS, is set to be lower than 5×10¹⁹ atoms/cm³, preferablylower than or equal to 5×10¹⁸ atoms/cm³, further preferably lower thanor equal to 1×10¹⁸ atoms/cm³, still further preferably lower than orequal to 5×10¹⁷ atoms/cm³.

It is preferable to reduce the concentrations of hydrogen and nitrogenin the gate insulating film 108, which is adjacent to the oxidesemiconductor film 104, in order to reduce the concentrations ofhydrogen and nitrogen in the oxide semiconductor film 104.

Further, the concentration of alkali metal or alkaline earth metal ofthe oxide semiconductor film 104, which is measured by SIMS, is set tolower than or equal to 1×10¹⁸ atoms/cm³, preferably lower than or equalto 2×10¹⁶ atoms/cm³. This is because an alkali metal and an alkalineearth metal might generate carriers when bonded to an oxidesemiconductor, in which case the off-state current of the transistormight be increased.

A transistor in which a highly purified oxide semiconductor film is usedfor a channel formation region as described above has an extremely lowoff-state current, and the off-state current standardized on the channelwidth of the transistor can be as low as several yoktoamperes permicrometer to several zeptoamperes per micrometer.

The oxide semiconductor film can be microfabricated in the followingmanner. Firstly, a hard mask, an organic coating film, and a resist areformed over the oxide semiconductor film. Next, electron beam exposureis performed, so that a resist mask is formed over the organic coatingfilm. Then, the hard mask and the organic coating film are etched andthen the oxide semiconductor film is etched using the resist mask andthe hard mask as masks. In this manner, line edge roughness (LER) of theoxide semiconductor film can be reduced. Alternatively, the lightexposure method is not limited to the electron beam exposure, and liquidimmersion exposure in which ArF excimer laser light is used as a lightsource or extreme ultraviolet (EUV) exposure may be used.

When the organic coating film is provided between the resist mask andthe hard mask as described above, the adhesion between the resist maskand the organic coating film can be improved. In the case where theadhesion between the resist mask and the hard mask is sufficient, theorganic coating film is not necessarily provided. Note that themicrofabrication of the oxide semiconductor film is described in detailbelow.

An oxide semiconductor film is classified roughly into a single-crystaloxide semiconductor film and a non-single-crystal oxide semiconductorfilm. The non-single-crystal oxide semiconductor film includes any of anamorphous oxide semiconductor film, a microcrystalline oxidesemiconductor film, a polycrystalline oxide semiconductor film, a c-axisaligned crystalline oxide semiconductor (CAAC-OS) film, and the like.

The amorphous oxide semiconductor film has disordered atomic arrangementand no crystalline component. A typical example thereof is an oxidesemiconductor film in which no crystal part exists even in a microscopicregion, and the whole of the film is amorphous.

The microcrystalline oxide semiconductor film includes a microcrystal(also referred to as nanocrystal) with a size greater than or equal to 1nm and less than 10 nm, for example. Thus, the microcrystalline oxidesemiconductor film has a higher degree of atomic order than theamorphous oxide semiconductor film. Hence, the density of defect statesof the microcrystalline oxide semiconductor film is lower than that ofthe amorphous oxide semiconductor film.

The CAAC-OS film is one of oxide semiconductor films including aplurality of crystal parts, and most of the crystal parts each fitinside a cube whose one side is less than 100 nm. Thus, there is a casewhere a crystal part included in the CAAC-OS film fits inside a cubewhose one side is less than 10 nm, less than 5 nm, or less than 3 nm.The density of defect states of the CAAC-OS film is lower than that ofthe microcrystalline oxide semiconductor film. The CAAC-OS film isdescribed in detail below.

In a transmission electron microscope (TEM) image of the CAAC-OS film, aboundary between crystal parts, that is, a grain boundary is not clearlyobserved. Thus, in the CAAC-OS film, a reduction in electron mobilitydue to the grain boundary is less likely to occur.

According to the TEM image of the CAAC-OS film observed in a directionsubstantially parallel to a sample surface (cross-sectional TEM image),metal atoms are arranged in a layered manner in the crystal parts. Eachmetal atom layer has a morphology reflected by a surface over which theCAAC-OS film is formed (hereinafter, a surface over which the CAAC-OSfilm is formed is referred to as a formation surface) or a top surfaceof the CAAC-OS film, and is arranged in parallel to the formationsurface or the top surface of the CAAC-OS film.

On the other hand, according to the TEM image of the CAAC-OS filmobserved in a direction substantially perpendicular to the samplesurface (plan TEM image), metal atoms are arranged in a triangular orhexagonal configuration in the crystal parts. However, there is noregularity of arrangement of metal atoms between different crystalparts.

From the results of the cross-sectional TEM image and the plan TEMimage, alignment is found in the crystal parts in the CAAC-OS film.

A CAAC-OS film is subjected to structural analysis with an X-raydiffraction (XRD) apparatus. For example, when the CAAC-OS filmincluding an InGaZnO₄ crystal is analyzed by an out-of-plane method, apeak appears frequently when the diffraction angle (2θ) is around 31°.This peak is derived from the (009) plane of the InGaZnO₄ crystal, whichindicates that crystals in the CAAC-OS film have c-axis alignment, andthat the c-axes are aligned in a direction substantially perpendicularto the formation surface or the top surface of the CAAC-OS film.

On the other hand, when the CAAC-OS film is analyzed by an in-planemethod in which an X-ray enters a sample in a direction substantiallyperpendicular to the c-axis, a peak appears frequently when 2θ is around56°. This peak is derived from the (110) plane of the InGaZnO₄ crystal.Here, analysis (φ scan) is performed under conditions where the sampleis rotated around a normal vector of a sample surface as an axis (φaxis) with 2θ fixed at around 56°. In the case where the sample is asingle-crystal oxide semiconductor film of InGaZnO₄, six peaks appear.The six peaks are derived from crystal planes equivalent to the (110)plane. On the other hand, in the case of a CAAC-OS film, a peak is notclearly observed even when φ scan is performed with 2θ fixed at around56°.

According to the above results, in the CAAC-OS film having c-axisalignment, while the directions of a-axes and b-axes are differentbetween crystal parts, the c-axes are aligned in a direction parallel toa normal vector of a formation surface or a normal vector of a topsurface. Thus, each metal atom layer arranged in a layered mannerobserved in the cross-sectional TEM image corresponds to a planeparallel to the a-b plane of the crystal.

Note that the crystal part is formed concurrently with deposition of theCAAC-OS film or is formed through crystallization treatment such as heattreatment. As described above, the c-axis of the crystal is aligned in adirection parallel to a normal vector of a formation surface or a normalvector of a top surface. Thus, for example, in the case where a shape ofthe CAAC-OS film is changed by etching or the like, the c-axis might notbe necessarily parallel to a normal vector of a formation surface or anormal vector of a top surface of the CAAC-OS film.

Further, the degree of crystallinity in the CAAC-OS film is notnecessarily uniform. For example, in the case where crystal growthleading to the CAAC-OS film occurs from the vicinity of the top surfaceof the film, the degree of the crystallinity in the vicinity of the topsurface is higher than that in the vicinity of the formation surface insome cases. Further, when an impurity is added to the CAAC-OS film, thecrystallinity in a region to which the impurity is added is changed, andthe degree of crystallinity in the CAAC-OS film varies depending onregions.

Note that when the CAAC-OS film with an InGaZnO₄ crystal is analyzed byan out-of-plane method, a peak of 2θ may also be observed at around 36°,in addition to the peak of 2θ at around 31°. The peak of 2θ at around36° indicates that a crystal having no c-axis alignment is included inpart of the CAAC-OS film. It is preferable that in the CAAC-OS film, apeak of 2θ appears at around 31° and a peak of 2θ do not appear ataround 36°.

With the use of the CAAC-OS film in a transistor, variation inelectrical characteristics of the transistor due to irradiation withvisible light or ultraviolet light is small. Thus, the transistor hashigh reliability.

Note that an oxide semiconductor film may be a stacked film includingtwo or more kinds of an amorphous oxide semiconductor film, amicrocrystalline oxide semiconductor film, and a CAAC-OS film, forexample.

For example, a CAAC-OS film can be deposited by a sputtering methodusing a polycrystalline oxide semiconductor sputtering target. When ionscollide with the sputtering target, a crystal region included in thesputtering target may be separated from the target along the a-b plane,and a sputtered particle having a plane parallel to the a-b plane(flat-plate-like sputtered particle or a pellet-like sputtered particle)might be separated from the sputtering target. In that case, theflat-plate-like sputtered particle reaches a substrate while maintainingits crystal state, whereby the CAAC-OS film can be formed.

For the deposition of the CAAC-OS film, the following conditions arepreferably used.

By reducing the amount of impurities entering the CAAC-OS film duringthe deposition, the crystal state can be prevented from being broken bythe impurities. For example, impurities (e.g., hydrogen, water, carbondioxide, or nitrogen) which exist in the deposition chamber may bereduced. Furthermore, impurities in a deposition gas may be reduced.Specifically, a film formation gas whose dew point is −80° C. or lower,preferably −100° C. or lower, more preferably −120° C. or lower is used.

By increasing the substrate heating temperature during the deposition,migration of a sputtered particle is likely to occur after the sputteredparticle reaches a substrate surface. Specifically, the substrateheating temperature during the deposition is higher than or equal to100° C. and lower than or equal to 740° C., preferably higher than orequal to 200° C. and lower than or equal to 500° C. By increasing thesubstrate heating temperature during the deposition, when theflat-plate-like sputtered particle reaches the substrate, migrationoccurs on the substrate surface, so that a flat plane of theflat-plate-like sputtered particle is attached to the substrate.

Furthermore, it is preferable that the proportion of oxygen in thedeposition gas be increased and the power be optimized in order toreduce plasma damage at the deposition. The proportion of oxygen in thedeposition gas is higher than or equal to 30 vol %, preferably 100 vol%.

As an example of the sputtering target, an In—Ga—Zn—O compound target isdescribed below.

The In—Ga—Zn—O compound target, which is polycrystalline, is made bymixing InO_(X) powder, GaO_(Y) powder, and ZnO_(Z) powder in apredetermined molar ratio, applying pressure, and performing heattreatment at a temperature higher than or equal to 1000° C. and lowerthan or equal to 1500° C. Note that X, Y, and Z are each a givenpositive number. The kinds of powder and the molar ratio for mixingpowder may be determined as appropriate depending on the desiredsputtering target.

Note that when silicon and carbon are contained in the oxidesemiconductor film 104 at a high concentration, the crystallinity of theoxide semiconductor film 104 is lowered in some cases. In order not tolower the crystallinity of the oxide semiconductor film 104, theconcentration of silicon in the oxide semiconductor film 104 is set tobe lower than 1×10¹⁹ atoms/cm³, preferably lower than 5×10¹⁸ atoms/cm³,further preferably lower than 2×10¹⁸ atoms/cm³. Moreover, in order notto lower the crystallinity of the oxide semiconductor film 104, theconcentration of carbon in the oxide semiconductor film 104 is set to belower than 1×10¹⁹ atoms/cm³, preferably lower than 5×10¹⁸ atoms/cm³,further preferably lower than 2×10¹⁸ atoms/cm³.

As described above, in the case where the oxide semiconductor film 104in which a channel is formed has high crystallinity and the density ofstates due to an impurity or a defect is low, a transistor including theoxide semiconductor film 104 has stable electrical characteristics.

For the source electrode 106 a and the drain electrode 106 b, aconductive material which is more likely to be bonded to oxygen than tobe bonded to a metal element included in the oxide semiconductor filmcan be used. For example, Al, Cr, Cu, Ta, Ti, Mo, W, or Ti can be used.W having a high melting point is especially preferred because arelatively high process temperature can be employed in a later step.Note that a conductive material which is likely to be bonded to oxygenincludes a material to which oxygen is easily diffused. Alternatively, aplurality of the above materials may be stacked. For example, Cu may bestacked over W.

A material of a conductive film to be the source electrode and the drainelectrode is a conductive material which is more likely to be bonded tooxygen than to a metal element included in the oxide semiconductor film;therefore, oxygen in the oxide semiconductor film 104 is bonded to theconductive material. The bonding causes oxygen vacancy in a region ofthe oxide semiconductor film 104 in the vicinity of an interface withthe conductive film. Alternatively, damage (oxygen vacancy) to the topsurface of the oxide semiconductor film 104 is caused when theconductive film to be formed over the oxide semiconductor film 104 isformed. Regions whose resistances are reduced owing to the oxygenvacancy and hydrogen, i.e., the low-resistance region 105 a and thelow-resistance region 105 b are formed, so that contact resistancebetween the oxide semiconductor film and the source electrode or thedrain electrode is reduced. Also in the case where the material of theconductive film is a conductive material which is easily diffused intothe oxide semiconductor film by heat treatment, the low-resistanceregion 105 a and the low-resistance region 105 b are formed.

Therefore, a channel formation region of the transistor 150 correspondsto a region A of the oxide semiconductor film 104 between thelow-resistance region 105 a and the low-resistance region 105 b andregions A1 (not illustrated) which include a region of thelow-resistance region 105 a which is not in contact with the sourceelectrode 106 a and a region of the low-resistance region 105 b which isnot in contact with the drain electrode 106 b. The resistance of thechannel formation region of the transistor 150 is reduced (the channelformation region is made to be an n-type); therefore, it is necessarythat the impurity concentration of the oxide semiconductor film 104 isreduced so that the oxide semiconductor film is a highly purified to beintrinsic. Obtaining a highly purified intrinsic oxide semiconductorfilm refers to purifying or substantially purifying the oxidesemiconductor film to be an intrinsic or substantially intrinsic oxidesemiconductor film. The term “substantially intrinsic” refers to thestate where an oxide semiconductor film has a carrier density lower than1×10¹⁷/cm³, preferably lower than 1×10¹⁵/cm³, further preferably lowerthan 1×10¹³/cm³.

In order that the channel formation region of the transistor 150 is ahighly purified to be intrinsic, oxygen is added to the region A and theregions A1 of the oxide semiconductor film 104. The addition of oxygencan reduces the amount of oxygen vacancy, so that a highly purifiedintrinsic region can be formed. Accordingly, the highly purifiedintrinsic region and the low resistance regions can be formed in aself-aligned manner.

Further, excess oxygen can be easily released from the base insulatingfilm 102 and the insulating film 112 by heat treatment, so that theoxygen vacancy in the oxide semiconductor film 104 can be reduced. Thus,the amount of oxygen vacancy in the channel formation region of theoxide semiconductor film 104 is further reduced, so that the channelformation region is a highly purified intrinsic region.

The gate insulating film 108 may be formed of a single layer or astacked layer using an insulating film containing one or more ofaluminum oxide, magnesium oxide, silicon oxide, silicon oxynitride,silicon nitride oxide, silicon nitride, gallium oxide, germanium oxide,yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide,hafnium oxide, and tantalum oxide.

A silicon oxide film can be used for the gate insulating film 108, forexample. It is preferable to use a silicon oxide film whose defectdensity is small as the silicon oxide film. Specifically, a siliconoxide film whose spin density attributed to a signal with a g factor of2.001 in ESR is lower than or equal to 3×10¹⁷ spins/cm³, preferablylower than or equal to 5×10¹⁶ spins/cm³ is used. As the silicon oxidefilm, a silicon oxide film containing excess oxygen is preferably used.

For the gate electrode 110, a conductive film formed using Al, Ti, Cr,Co, Ni, Cu, Y, Zr, Mo, Ru, Ag, Ta, W, or the like can be used. The gateelectrode 110 may be a stacked layer of any of the above materials.

The gate insulating film 112 may be formed of a single layer or astacked layer using an insulating film containing one or more ofaluminum oxide, magnesium oxide, silicon oxide, silicon oxynitride,silicon nitride oxide, silicon nitride, gallium oxide, germanium oxide,yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide,hafnium oxide, and tantalum oxide.

The insulating film 112 may be, for example, a stacked film including asilicon oxide film as a first layer and a silicon nitride film as asecond layer. In this case, the silicon oxide film may be a siliconoxynitride film. The silicon nitride film may be a silicon nitride oxidefilm. It is preferable to use a silicon oxide film whose defect densityis small as the silicon oxide film. Specifically, a silicon oxide filmwhose spin density attributed to a signal with a g factor of 2.001 inelectron spin resonance (ESR) is lower than or equal to 3×10¹⁷spins/cm³, preferably lower than or equal to 5×10¹⁶ spins/cm³ is used.As the silicon nitride film, a silicon nitride film from which ahydrogen gas and an ammonia gas are less likely to be released is used.The amount of released hydrogen gas or ammonia gas may be measured bythermal desorption spectroscopy (TDS). Further, as the silicon nitridefilm, a silicon nitride film which does not transmit or hardly transmitshydrogen, water, and oxygen is used.

The insulating film 112 may be, for example, a stacked film including afirst silicon oxide film as a first layer, a second silicon oxide filmas a second layer, and a silicon nitride film as a third layer. In thiscase, one of or both the first silicon oxide film and the second siliconoxide film may be a silicon oxynitride film. The silicon nitride filmmay be a silicon nitride oxide film. It is preferable to use a siliconoxide film whose defect density is small as the first silicon oxidefilm. Specifically, a silicon oxide film whose spin density attributedto a signal with a g factor of 2.001 in ESR is lower than or equal to3×10¹⁷ spins/cm³, preferably lower than or equal to 5×10¹⁶ spins/cm³ isused. As the second silicon oxide film, a silicon oxide film containingexcess oxygen is used. As the silicon nitride film, a silicon nitridefilm from which a hydrogen gas and an ammonia gas are less likely to bereleased is used. The amount of released hydrogen gas or ammonia gas maybe measured by TDS. Further, as the silicon nitride film, a siliconnitride film which does not transmit or hardly transmits hydrogen,water, and oxygen is used.

In the case where at least one of the gate insulating film 108 and theinsulating film 112 includes an insulating film containing excessoxygen, oxygen vacancies in the oxide semiconductor film 104 arereduced, so that stable electrical characteristics of a transistor canbe achieved.

Next, a method for manufacturing the transistor 150 is described withreference to FIGS. 2A to 2D and FIGS. 3A to 3D.

First, the substrate 100 is prepared.

Next, the base insulating film 102 is formed over the substrate 100.Then, an oxide semiconductor film 103 is deposited over the baseinsulating film 102 (see FIG. 2A). The base insulating film has afunction of suppressing entry of impurities from the substrate 100 side.The base insulating film can be formed by a plasma CVD (chemical vapordeposition) method, a sputtering method, or the like.

The oxide semiconductor film 103 may be deposited by a sputteringmethod, a CVD method, an MBE method, an ALD method, or a PLD method.

In the case where the oxide semiconductor film 103 is formed by asputtering method, a power supply device for generating plasma can be anRF power supply device, an AC power supply device, a DC power supplydevice, or the like as appropriate.

As a sputtering gas, a rare gas (typically argon) atmosphere, an oxygenatmosphere, or a mixed gas of a rare gas and oxygen is used asappropriate. In the case of using the mixed gas of a rare gas andoxygen, the proportion of oxygen is preferably higher than that of arare gas.

Further, a target may be appropriately selected in accordance with thecomposition of the oxide semiconductor film 103.

In the case of using a sputtering method, at least the oxidesemiconductor film 103 can become a CAAC-OS film by the followingmethod. Specifically, the oxide semiconductor film 103 is formed whilethe substrate is heated at a temperature higher than or equal to 150° C.and lower than or equal to 500° C., preferably higher than or equal to150° C. and lower than or equal to 450° C., more preferably higher thanor equal to 200° C. and lower than or equal to 350° C.

Subsequently, first heat treatment is preferably performed. The firstheat treatment can be performed at a temperature higher than or equal to250° C. and lower than or equal to 650° C., preferably higher than orequal to 300° C. and lower than or equal to 500° C. The first heattreatment is performed in an inert gas atmosphere, an atmospherecontaining an oxidizing gas at 10 ppm or more, preferably 1% or more, ormore preferably 10% or more, or under reduced pressure. Alternatively,the first heat treatment may be performed in such a manner that heattreatment is performed in an inert gas atmosphere, and then another heattreatment is performed in an atmosphere containing an oxidizing gas at10 ppm or more, preferably 1% or more, or more preferably 10% or more inorder to compensate desorbed oxygen. The first heat treatment enablesthe crystallinity of the oxide semiconductor film 103 to be improved,and in addition, impurities such as water, hydrogen, nitrogen, andcarbon to be removed from the oxide semiconductor film.

Next, a hard mask 120 is deposited over the oxide semiconductor film103, an organic coating film 122 is deposited over the hard mask 120,and a resist is formed over the organic coating film 122. Then, theresist is exposed to an electron beam, so that a resist mask 124 isformed (see FIG. 2B).

The hard mask 120 may be a single layer or a stacked layer of a simplesubstance selected from Ti, Mo, Ta, and W; a nitride containing one ormore kinds of the above substances; or an alloy containing one or morekinds of the above substances. Alternatively, an oxide insulating filmwhich is formed using silicon oxide or the like or a nitride insulatingfilm which is formed using silicon nitride or the like may be used.Alternatively, an oxide or an oxynitride which contains at least In andZn may be used. For example, an In—Ga—Zn—O—N-based material may be used.

When the organic coating film 122 is provided between the resist mask124 and the hard mask 120 as described above, the adhesion between theresist mask 124 and the organic coating film 122 can be improved. In thecase where the adhesion between the resist mask 124 and the hard mask120 is sufficient, the organic coating film 122 is not necessarilyprovided; however, when the organic coating film 122 is provided, theadhesion between the hard mask 120 and the organic coating film 122 andthe adhesion between the organic coating film 122 and the resist can beimproved, leading to improvements in productivity and reliability.

As the organic coating film 122, a bottom anti-reflective coating (BARC)film such as SWK-T7 (manufactured by TOKYO OHKA KOGYO CO., LTD), anadhesion promoter such as AZ AD Promoter (manufactured by AZ ELECTRONICMATERIALS), or the like can be used.

In an electron beam lithography apparatus capable of electron beamirradiation, the acceleration voltage is preferably in the range from 5kV to 50 kV, for example. The current intensity is preferably greaterthan or equal to 5×10⁻¹² A and less than or equal to 1×10⁻¹¹ A. Theminimum beam size is preferably 2 nm or less. The minimum possiblepattern line width is preferably 8 nm or less.

Under the above conditions, the resist mask 124 with a width of, forexample, 1 nm or more and 30 nm or less, preferably 20 nm or less, morepreferably 8 nm or less, can be obtained.

For the exposure to an electron beam, it is preferable that the resistbe as thin as possible so that the resist mask 124 has a minute linewidth. When the resist is thin, a surface on which the resist is formedis preferably as flat as possible. In the method for manufacturing thesemiconductor device of this embodiment, the unevenness due to the baseinsulating film 102 and the like can be reduced by planarizationtreatment such as a polishing treatment (i.e. CMP treatment), etching(dry etching or wet etching) treatment, plasma treatment, or the like ofthe base insulating film 102 and the like; thus, the resist mask can bethin. This facilitates the exposure to an electron beam.

The channel length of the transistor 150 is preferably equal in any partof the transistor. In the case where the shape of the channel formationregion of the transistor includes a curved line, it is preferable toform the curved line by exposure to an electron beam so as to be smoothand so as to have an equal the line width. Note that a channel lengthrefers to a distance between a source electrode and a drain electrode ofa transistor.

In order to form a smooth curved line with an equal line width byexposure to an electron beam, there is a method for exposure of a curvedline by rotating a stage overlapping with a substrate thereon, forexample. With a linearly movable stage, a resist mask can also bepatterned so that the channel length of the transistor becomes equal, byusing a method in which the size or direction of a figure for dividingelectron beam writing regions is optimized in accordance with thepattern of the electron beam, a multi-pass writing method in which afigure is shifted by a uniform width and writing is performed with anoverlap so that the amount of light exposure of a pattern becomes equal,or the like. It is preferable to use the above method or the like toform a resist mask with an equal line width so that the channel lengthof the transistor 150 becomes equal.

Alternatively, liquid immersion exposure in which ArF excimer laserlight is used as a light source or EUV exposure may be used for thelight exposure. Here, the liquid immersion exposure in which ArF excimerlaser light is used as a light source is described with reference toFIG. 15 and FIG. 16.

The resolution of a light exposure apparatus is described. The linewidth of exposure light is expressed by the following formula(Rayleigh's formula).

$\begin{matrix}{R = {k \cdot \frac{\lambda}{NA}}} & \left\lbrack {{Formula}\mspace{14mu} 1} \right\rbrack\end{matrix}$

Here, R is a line width of the exposure light, k is a proportionalconstant which depends on a resist material and a light exposure method,λ is a wavelength of the exposure light, and NA is brightness (numericalaperture) of the projection lens. Note that NA is expressed by thefollowing formula.NA=n·sin θ  [Formula 2]

Here, n is a refractive index between the lens and the resist; θ is anaperture angle of the lens shown in FIG. 16.

In order to obtain high resolution by a reduction in the line width R ofthe exposure light, it is necessary to reduce the wavelength of a lightsource or to increase NA. Here, in order to increase NA, a space betweenthe projection lens of the light exposure apparatus and a wafer isfilled with liquid (pure water: n=1.44) as illustrated in FIG. 15.

When a space between the projection lens and the wafer is filled withthe liquid (pure water), the refractive index n of a medium disposedbetween the lens and the resist is increased and NA is increasedaccordingly; thus, the line width R of the exposure light is reduced,whereby the resolution can be increased.

Note that when NA is too large, the exposure light exceeds a criticalangle and total reflection occurs at an interface with the lens. Thecritical angle is expressed by the following formula.

$\begin{matrix}{{CA} = {\sin^{- 1}\left( \frac{n\; 2}{n\; 1} \right)}} & \left\lbrack {{Formula}\mspace{14mu} 3} \right\rbrack\end{matrix}$

Here, CA is a critical angle, n1 is a refractive index of a mediumdisposed on the side from which light is emitted and an incident side,and n2 is a refractive index of a medium disposed on the side to whichthe light is emitted.

For example, when n1 is 1.5 and there is nothing between the projectionlens and the wafer (only air: n=1.0), the critical angle is 42°;however, in the case of using a liquid immersion technique (where purewater is used), the critical angle is 73°. Therefore, with the use ofthe liquid immersion technique, the angle at which light can enter amedium can be broadened and NA can be increased.

Next, the organic coating film 122 and the hard mask 120 are selectivelyetched using the resist mask 124 as a mask, so that an organic coatingfilm 123 and a hard mask 121 are formed (see FIG. 2C).

Note that for the hard mask 121, a hard mask which has a high etchingselection ratio with respect to the resist mask 124 and with which apattern of the resist mask 124 can be easily formed even if the resistmask 124 is thin is preferably used. Further, it is preferable that thehard mask 121 be not easily etched under conditions where the oxidesemiconductor film 103 is etched, because the hard mask 121 is used as amask when the oxide semiconductor film 103 is etched.

Next, the oxide semiconductor film 103 is selectively etched with theuse of the resist mask 124 and the hard mask 121 as masks, so that theoxide semiconductor film 104 is formed (see FIG. 2D).

Then, the hard mask 121, the organic coating film 123, and the resistmask 124 over the oxide semiconductor film 104 are removed (see FIG.3A). There is no particular limitation on the removal treatment; forexample, etching, ashing using oxygen plasma, or the like may beperformed.

Alternatively, the following process may be employed. Before the oxidesemiconductor film 103 is etched, the organic coating film 123 and theresist mask 124 are removed by ashing using oxygen plasma. After that,the oxide semiconductor film 104 is formed by etching the oxidesemiconductor film 103 and then the hard mask 121 is removed.

Next, a conductive film to be the source electrode 106 a and the drainelectrode 106 b is deposited over the base insulating film 102 and theoxide semiconductor film 104 and then part of the conductive film isprocessed to form the source electrode 106 a and the drain electrode 106b (see FIG. 3B). The edge portions of the source electrode 106 a and thedrain electrode 106 b are formed to have a step as shown in thedrawings. The edge portions can be formed in such a manner that a stepof making a resist mask reduce by ashing and an etching step arealternately performed a plurality of times. The conductive film may bedeposited by a sputtering method, a CVD method, an MBE method, an ALDmethod, or a PLD method using the material of the source electrode 106 aand the drain electrode 106 b described above.

For a conductive film to be the source electrode 106 a and the drainelectrode 106 b, a conductive material which is more likely to be bondedto oxygen than to be bonded to a metal element included in the oxidesemiconductor film is used. A material of the conductive film is aconductive material which is likely to be bonded to oxygen; therefore,oxygen in the oxide semiconductor film 104 is bonded to the conductivematerial (the conductive film). The bonding causes oxygen vacancy in aregion of the oxide semiconductor film 104 in the vicinity of aninterface with the conductive film. Alternatively, damage (oxygenvacancy) to the top surface of the oxide semiconductor film 104 iscaused when the conductive film to be formed over the oxidesemiconductor film 104 is formed. By the oxygen vacancy, alow-resistance region 105 is formed. In this embodiment, thelow-resistance region 105 exists in a region at a depth of greater than0 nm and less than or equal to 15 nm, preferably less than 10 nm,further preferably less than 3 nm from the interface between the oxidesemiconductor film 104 and the conductive film in the depth direction ofthe oxide semiconductor film 104.

When the low-resistance region 105 is formed, contact resistance betweenthe source electrode or the drain electrode to be formed later and theoxide semiconductor film 104 can be reduced, so that high-speedoperation of the transistor 150 can be achieved.

Further, the step of making the resist mask reduce by ashing and theetching step are alternately performed, whereby the edge portions of thesource electrode 106 a and the drain electrode 106 b are provided overthe low-resistance region 105 a and the low-resistance region 105 b tobe formed later.

Therefore, the channel formation region of the transistor 150corresponds to a region B of the low-resistance region 105 which is notin contact with the source electrode 106 a and the drain electrode 106b. That is, the channel formation region consists of the region A of theoxide semiconductor film and the regions A1. The channel formationregion of the transistor 150 is made to be an n-type; therefore, it isnecessary that the impurity concentration of the oxide semiconductorfilm 104 is reduced so that the oxide semiconductor film is a highlypurified to be intrinsic.

Next, the gate insulating film 108 is formed (see FIG. 3C). The gateinsulating film 108 may be formed by a sputtering method, a CVD method,an MBE method, an ALD method, or a PLD method using a material of thegate insulating film 108 described above.

Next, oxygen is added to the region B which is to be the channelformation region of the oxide semiconductor film, so that thelow-resistance region 105 a and the low-resistance region 105 b areformed.

Oxygen can be added to the region B of the oxide semiconductor film byan ion doping method or an ion implantation method. Alternatively, as amethod for adding oxygen, a plasma immersion ion implantation method maybe used. Alternatively, oxygen can be added by a method other than anion doping method, an ion implantation method, or the like. For example,oxygen can be added in such a manner that plasma is generated in anoxygen atmosphere and then the region B is subjected to plasma treatmentin the oxygen atmosphere. As an apparatus for generating plasma, a dryetching apparatus, a plasma CVD apparatus, a high-density plasma CVDapparatus, or the like can be used.

At least one of an oxygen radical, an oxygen atom, and an oxygen ion isadded to the region B of the oxide semiconductor film as the oxygen.Further, the oxygen may be added to at least part of the region B,typically any of a surface of the region B of the oxide semiconductorfilm, an inner part of the region B of the oxide semiconductor film, andthe interface between the region B of the oxide semiconductor film andthe base insulating film 102.

In the case where oxygen is added to the region B of the oxidesemiconductor film by an ion doping method or an ion implantationmethod, the amount of oxygen added to the region B of the oxidesemiconductor film is larger than or equal to 5×10¹⁹/cm³ and smallerthan or equal to 5×10²¹/cm³. In this case, when the oxygen has highenergy, the region B of the oxide semiconductor film is damaged andphysical defects are caused. Therefore, the oxygen preferably has suchenergy which does not cause damage on the oxide semiconductor film. Theregion B of the oxide semiconductor film includes a region in which anoxygen content increases from the surface toward the depth direction ofthe oxide semiconductor film.

The whole low-resistance region 105 a does not necessarily overlap withthe source electrode and may include a region which extends to thelow-resistance region 105 b side and does not overlap with the sourceelectrode. Further, the whole low-resistance region 105 b does notnecessarily overlap with the drain electrode and may include a regionwhich extends to the low-resistance region 105 a side and does notoverlap with the drain electrode. The low-resistance region 105 a andthe low-resistance region 105 b do not necessarily have uniformthickness. For example, the end portion of the low-resistance region 105a which does not overlap with the source electrode may gently spreadfrom the bottom surface toward the surface of the low-resistance region105 a. In a similar manner, for example, the end portion of thelow-resistance region 105 b which does not overlap with the drainelectrode may gently spread from the bottom surface toward the surfaceof the low-resistance region 105 b. A difference between the lengthbetween the source electrode 106 a and the drain electrode 106 b and thelength between the low-resistance region 105 a and the low-resistanceregion 105 b is less than 30%, preferably less than 10%, furtherpreferably less than 3% of the length between the source electrode 106 aand the drain electrode 106 b.

Next, second heat treatment is preferably performed. The second heattreatment can be performed in a similar condition to the first heattreatment. By the second heat treatment, impurities such as hydrogen andwater can be further removed from the oxide semiconductor film 104.

Next, a conductive film to be the gate electrode 110 is deposited overthe gate insulating film 108 and then part of the conductive film isprocessed to form the gate electrode 110. The conductive film may bedeposited by a sputtering method, a CVD method, an MBE method, an ALDmethod, or a PLD method using a material of the gate electrode 110described above.

Next, the insulating film 112 is formed over the source electrode 106 a,the drain electrode 106 b, and the gate electrode 110 (see FIG. 3D). Theinsulating film 112 can be formed by a plasma CVD method, a sputteringmethod, or the like.

Next, third heat treatment is preferably performed. The third heattreatment can be performed in a similar condition to the first heattreatment. In the case where the base insulating film 102 and theinsulating film 112 contain excess oxygen, the excess oxygen is easilyreleased from the base insulating film 102 and the insulating film 112by the third heat treatment, so that oxygen vacancy in the oxidesemiconductor film 104 can be reduced. Accordingly, the amount of oxygenvacancy in the channel formation region of the oxide semiconductor film104 can be further reduced, so that the channel formation region becomesa highly purified intrinsic region.

In this manner, the transistor 150 can be manufactured.

By such a manufacturing method, when the oxide semiconductor film ismicrofabricated to have an island shape, unevenness of an end portion ofthe oxide semiconductor film can be suppressed. Accordingly, aminiaturized transistor having high electrical characteristics can beprovided in a high yield. Further, also in a semiconductor deviceincluding the transistor, high performance, high reliability, and highproductivity can be achieved.

This embodiment can be combined with any of the other embodiments inthis specification as appropriate.

Embodiment 2

In this embodiment, a transistor having a structure different from thatof the transistor described in Embodiment 1 is described.

FIGS. 4A to 4C are a top view and cross-sectional views of a transistor250 of one embodiment of the present invention. FIG. 4A is the top view,and a cross section taken along a dashed-dotted line A1-A2 in FIG. 4A isillustrated in FIG. 4B. FIG. 4C is an enlarged view of a regionsurrounded by a dashed-line circle in FIG. 4B. Note that forsimplification of the drawing, some components in the top view in FIG.4A are not illustrated.

The transistor 250 illustrated in FIGS. 4A to 4C includes a baseinsulating film 102 over a substrate 100, an oxide film 204 a over thebase insulating film 102, an oxide semiconductor film 204 b over theoxide film 204 a, an oxide film 204 c over the oxide semiconductor film204 b, a source electrode 106 a and a drain electrode 106 b which are incontact with the oxide film 204 c, a gate insulating film 108 over theoxide film 204 c, the source electrode 106 a, and the drain electrode106 b, and a gate electrode 110 over the gate insulating film 108. Inaddition, an insulating film 112 may be provided over the gateinsulating film 108 and the gate electrode 110. Note that the insulatingfilm 112 is provided as needed and another insulating film may befurther provided thereover.

Depending on materials used for the oxide film 204 a, the oxidesemiconductor film 204 b, and the oxide film 204 c, boundaries betweenthe oxide film 204 a and the oxide semiconductor film 204 b and betweenthe oxide semiconductor film 204 b and the oxide film 204 c cannot beclearly recognized in some cases. Thus, the boundaries of the oxide film204 a, the oxide semiconductor film 204 b, and the oxide film 204 c aredenoted by dotted lines in the drawings.

The transistor 250 illustrated in FIGS. 4A to 4C is different from thetransistor 150 described in Embodiment 1 in that the oxide films areprovided over and under the oxide semiconductor film. Embodiment 1 canbe referred to for the other structures.

The oxide film 204 a, the oxide semiconductor film 204 b, and the oxidefilm 204 c each contain one or both of In and Ga. Typical examplesinclude an In—Ga oxide (an oxide containing In and Ga), an In—Zn oxide(an oxide containing In and Zn), and an In-M-Zn oxide (an oxidecontaining In, an element M, and Zn; the element M is one or more kindsof elements selected from Al, Ti, Ga, Y, Zr, La, Ce, Nd, and Hf).

The oxide film 204 a and the oxide film 204 c are preferably formedusing a material including one or more kinds of metal elements includedin the oxide semiconductor film 204 b. With the use of such a material,an interface state at interfaces between the oxide semiconductor film204 b and each of the oxide films 204 a and 204 c is less likely to begenerated. Thus, scattering of carriers or capture of carriers at theinterface does not easily occur, so that the field-effect mobility ofthe transistor can be improved. Further, variation in threshold voltageof the transistor can be reduced. Note that the oxide film 204 a, theoxide semiconductor film 204 b, and the oxide film 204 c arecollectively referred to as a multilayer film, in some cases.

Further, it is preferable that each of the oxide film 204 a and theoxide film 204 c be formed using an oxide semiconductor whose energy ofthe bottom of the conduction band is closer to the vacuum level thanthat of the oxide semiconductor film 204 b by 0.05 eV or more, 0.07 eVor more, 0.1 eV or more, or 0.15 eV or more and 2 eV or less, 1 eV orless, 0.5 eV or less, or 0.4 eV or less.

When an electric field is applied to the gate electrode 110 in such astructure, a channel is formed in the oxide semiconductor film 204 b ofthe multilayer film, because the oxide semiconductor film 204 b has lowenergy at the bottom of the conduction band. In other words, the oxidefilm 204 c is formed between the oxide semiconductor film 204 b and thegate insulating film 108, whereby a structure in which the channel ofthe transistor is not in contact with the gate insulating film can beobtained.

Depending on materials used for the oxide film 204 a, the oxidesemiconductor film 204 b, and the oxide film 204 c, boundaries betweenthe oxide film 204 a and the oxide semiconductor film 204 b and betweenthe oxide semiconductor film 204 b and the oxide film 204 c cannot beclearly recognized in some cases. Therefore, in the drawings, the oxidesemiconductor film 204 b is indicated using a different hatching patternfrom those of the oxide film 204 a and the oxide film 204 c.

The thickness of the oxide film 204 a is greater than or equal to 3 nmand less than or equal to 50 nm, preferably greater than or equal to 3nm and less than or equal to 20 nm. The thickness of the oxidesemiconductor film 204 b is greater than or equal to 3 nm and less thanor equal to 200 nm, preferably greater than or equal to 3 nm and lessthan or equal to 100 nm, further preferably greater than or equal to 3nm and less than or equal to 50 nm. The thickness of the oxide film 204c is greater than or equal to 3 nm and less than or equal to 100 nm,preferably greater than or equal to 3 nm and less than or equal to 50nm.

When each of the oxide semiconductor film 204 b and the oxide film 204 ais an In-M-Zn oxide and the oxide film 204 a and the oxide semiconductorfilm 204 b contain In, M, and Zn at an atomic ratio of x₁:y₁:z₁ and anatomic ratio of x₂:y₂:z₂ respectively, y₁/x₁ needs to be larger thany₂/x₂. Note that the element M is a metal element which has a higherability than In to bind to oxygen, examples of which include Al, Ti, Ga,Y, Zr, Sn, La, Ce, Nd, Hf, and the like. Preferably, the oxidesemiconductor film 204 b and the oxide film 204 a in which y₁/x₁ is 1.5times or more as large as y₂/x₂ are selected. More preferably, the oxidesemiconductor film 204 b and the oxide film 204 a in which y₁/x₁ istwice or more as large as y₂/x₂ are selected. Still further preferably,the oxide semiconductor film 204 b and the oxide film 204 a in whichy₁/x₁ is three times or more as large as y₂/x₂ are selected. At thistime, y₁ is preferably greater than or equal to x₁ in the oxidesemiconductor film 204 b, in which case stable electricalcharacteristics of a transistor can be achieved. However, when y₁ isthree times or more as large as x₁, the field-effect mobility of thetransistor is reduced; accordingly, y₁ is preferably smaller than threetimes x₁. When the oxide film 204 a has the above structure, the oxidefilm 204 a can be a film in which oxygen vacancies are less likely tooccur than in the oxide semiconductor film 204 b.

When the oxide semiconductor film 204 b is an In-M-Zn oxide, it ispreferable that without taking Zn and O into consideration, theproportion of In be greater than or equal to 25 atomic % and theproportion of M be less than 75 atomic %, and it is more preferable thatthe proportion of In be greater than or equal to 34 atomic % and theproportion of M be less than 66 atomic %. When the oxide film 204 a isan In-M-Zn oxide, it is preferable that without taking Zn and O intoconsideration, the proportion of In be less than 50 atomic % and theproportion of M be greater than or equal to 50 atomic %, and it is morepreferable that the proportion of In be less than 25 atomic % and theproportion of M be greater than or equal to 75 atomic %.

For example, as the oxide semiconductor film 204 b, an In—Ga—Zn oxide inwhich an atomic ratio of In to Ga and Zn is 1:1:1 or 3:1:2 can be used.As the oxide film 204 a, an In—Ga—Zn oxide in which an atomic ratio ofIn to Ga and Zn is 1:3:4, 1:3:2, 1:6:2, 1:6:4, 1:6:10, 1:9:6, or 1:9:0can be used. Note that the atomic ratio of each of the oxidesemiconductor film 204 b and the oxide film 204 a may vary within amargin of ±20% of the corresponding atomic ratio.

Likewise, when each of the oxide semiconductor film 204 b and the oxidefilm 204 c is an In-M-Zn oxide and the oxide film 204 c and the oxidesemiconductor film 204 b contain In, M, and Zn at an atomic ratio ofx₁:y₁:z₁ and an atomic ratio of x₂:y₂:z₂ respectively, y₁/x₁ needs to belarger than y₂/x₂. Note that the element M is a metal element which hasa higher ability than In to bind to oxygen, examples of which includeAl, Ti, Ga, Y, Zr, Sn, La, Ce, Nd, Hf, and the like. Preferably, theoxide semiconductor film 204 b and the oxide film 204 c in which y₁/x₁is 1.5 times or more as large as y₂/x₂ are selected. More preferably,the oxide semiconductor film 204 b and the oxide film 204 c in whichy₁/x₁ is twice or more as large as y₂/x₂ are selected. Still furtherpreferably, the oxide semiconductor film 204 b and the oxide film 204 cin which y₁/x₁ is three times or more as large as y₂/x₂ are selected. Atthis time, y₁ is preferably greater than or equal to x₁ in the oxidesemiconductor film 204 b, in which case stable electricalcharacteristics of a transistor can be achieved. However, when y₁ isthree times or more as large as x₁, the field-effect mobility of thetransistor is reduced; accordingly, y₁ is preferably smaller than threetimes x₁. When the oxide film 204 c has the above structure, the oxidefilm 204 c can be a film in which oxygen vacancies are less likely tooccur than in the oxide semiconductor film 204 b.

When the oxide semiconductor film 204 b is an In-M-Zn oxide, it ispreferable that without taking Zn and O into consideration, theproportion of In be greater than or equal to 25 atomic % and theproportion of M be less than 75 atomic %, and it is more preferable thatthe proportion of In be greater than or equal to 34 atomic % and theproportion of M be less than 66 atomic %. When the oxide film 204 c isan In-M-Zn oxide, it is preferable that without taking Zn and O intoconsideration, the proportion of In be less than 50 atomic % and theproportion of M be greater than or equal to 50 atomic %, and it is morepreferable that the proportion of In be less than 25 atomic % and theproportion of M be greater than or equal to 75 atomic %.

For example, as the oxide semiconductor film 204 b, an In—Ga—Zn oxide inwhich an atomic ratio of In to Ga and Zn is 1:1:1 or 3:1:2 can be used.As the oxide film 204 c, an In—Ga—Zn oxide in which an atomic ratio ofIn to Ga and Zn is 1:3:4, 1:3:2, 1:6:2, 1:6:4, 1:6:10, 1:9:6, or 1:9:0can be used. Note that the atomic ratio of each of the oxidesemiconductor film 204 b and the oxide film 204 c may vary within amargin of ±20% of the corresponding atomic ratio.

In order to give stable electrical characteristics to the transistorincluding the multilayer film, it is preferable that the oxygenvacancies and the impurity concentration in the oxide semiconductor film204 b be reduced and the oxide semiconductor film 204 b be an intrinsicor substantially intrinsic semiconductor film. In particular, thechannel formation region in the oxide semiconductor film 204 b ispreferably regarded as intrinsic or substantially intrinsic.Specifically, the carrier density of the oxide semiconductor film 204 bis smaller than 1×10¹⁷/cm³, smaller than 1×10¹⁵/cm³, or smaller than1×10¹³/cm³.

Further, in the oxide semiconductor film 204 b, hydrogen, nitrogen,carbon, silicon, and a metal element other than main components areimpurities. In order to reduce the concentration of impurities in theoxide semiconductor film 204 b, it is also preferable to reduce theconcentration of impurities in the oxide film 204 a and the oxide film204 c which are close to the oxide semiconductor film 204 b, to a valuealmost equal to that in the oxide semiconductor film 204 b.

In particular, when silicon is contained in the oxide semiconductor film204 b at a high concentration, an impurity level caused by silicon isformed in the oxide semiconductor film 204 b. The impurity level servesas a trap level, and may degrade electrical characteristics of atransistor. In order to reduce degradation of electrical characteristicsof the transistor, the silicon concentration of the oxide semiconductorfilm 204 b is smaller than 1×10¹⁹ atoms/cm³, preferably smaller than5×10¹⁸ atoms/cm³, more preferably smaller than 1×10¹⁸ atoms/cm³.Further, the concentration of silicon at an interface between the oxidesemiconductor film 204 b and each of the oxide films 204 a and 204 c isalso in the above range.

Note that as the gate insulating film of the transistor, an insulatingfilm containing silicon is used in many cases; therefore, it ispreferable that a region of the oxide semiconductor film, which servesas a channel, be not in contact with the insulating film for theabove-described reason. In the case where a channel is formed at theinterface between a gate insulating film and an oxide semiconductorfilm, scattering of carriers occurs at the interface, whereby thefield-effect mobility of a transistor is reduced in some cases. Alsofrom the view of the above, it is preferable that a region of the oxidesemiconductor film, which serves as a channel, be separated from thegate insulating film.

Therefore, when the multilayer film has the stacked-layer structure ofthe oxide film 204 a, the oxide semiconductor film 204 b, and the oxidefilm 204 c, the oxide semiconductor film 204 b in which a channel of thetransistor is formed can be separated from the gate insulating film, sothat the transistor can have high field effect mobility and stableelectrical characteristics.

Further, in the oxide semiconductor film 204 b, hydrogen and nitrogengenerate a donor level, and increase the carrier density. In order tomake the oxide semiconductor film 204 b intrinsic or substantiallyintrinsic, the concentration of hydrogen in the oxide semiconductor film204 b, which is measured by SIMS, is set to be lower than or equal to2×10²⁰ atoms/cm³, preferably lower than or equal to 5×10¹⁹ atoms/cm³,more preferably lower than or equal to 1×10¹⁹ atoms/cm³, still morepreferably lower than or equal to 5×10¹⁸ atoms/cm³. The concentration ofnitrogen in the oxide semiconductor film 204 b, which is measured bySIMS, is set to be lower than 5×10¹⁹ atoms/cm³, preferably lower than orequal to 5×10¹⁸ atoms/cm³, more preferably lower than or equal to 1×10¹⁸atoms/cm³, still more preferably lower than or equal to 5×10¹⁷atoms/cm³.

Note that when silicon and carbon are contained in the oxidesemiconductor film 204 b at a high concentration, the crystallinity ofthe oxide semiconductor film 204 b is lowered in some cases. In ordernot to lower the crystallinity of the oxide semiconductor film 204 b,the concentration of silicon in the oxide semiconductor film 204 b isset to be lower than 1×10¹⁹ atoms/cm³, preferably lower than 5×10¹⁸atoms/cm³, more preferably lower than 1×10¹⁸ atoms/cm³. Moreover, inorder not to lower the crystallinity of the oxide semiconductor film 204b, the concentration of carbon in the oxide semiconductor film 204 b isset to be lower than 1×10¹⁹ atoms/cm³, preferably lower than 5×10¹⁸atoms/cm³, more preferably lower than 1×10¹⁸ atoms/cm³.

Further, since the band gap of an oxide semiconductor is 2 eV or higher,in a transistor including an oxide semiconductor, leakage current whenthe transistor is off (also referred to as off-state current) isextremely small.

Localized levels of the multilayer film are described below. By reducingthe density of the localized state of the multilayer film, thetransistor including the multilayer film can have stable electricalcharacteristics. The density of the localized levels of the multilayerfilm can be measured by a constant photocurrent method (CPM).

In order that the transistor has stable electrical characteristics, theabsorption coefficient due to the localized states of the multilayerfilm measured by CPM is preferably lower than 1×10⁻³ cm⁻¹, morepreferably lower than 3×10⁴ cm⁻¹. Further, when the absorptioncoefficient due to the localized states of the multilayer film measuredby CPM is lower than 1×10⁻³ cm⁻¹, preferably lower than 3×10⁴ cm⁻¹, thefield-effect mobility of the transistor can be increased. In order thatthe absorption coefficient due to the localized level of the multilayerfilm measured by CPM is lower than 1×10⁻³ cm⁻¹, preferably lower than3×10⁻⁴ cm⁻¹, the concentration of silicon, germanium, carbon, and thelike in the oxide semiconductor film 204 b which form the localizedlevel is preferably lower than 2×10¹⁸ atoms/cm³, further preferablylower than 2×10¹⁷ atoms/cm³.

In the CPM measurement, the amount of light with which a surface of thesample between terminals is irradiated is adjusted so that aphotocurrent value is kept constant in the state where voltage isapplied between electrodes provided in contact with the multilayer filmthat is the sample, and then an absorption coefficient is derived fromthe amount of the irradiation light at each wavelength. In the CPMmeasurement, when the sample has a defect, the absorption coefficient ofenergy which corresponds to a level at which the defect exists(calculated from a wavelength) is increased. The increase in theabsorption coefficient is multiplied by a constant, whereby the defectdensity of the sample can be obtained.

The localized levels measured by CPM probably result from an impurity ora defect. In other words, a transistor which includes the multilayerfilm having a small absorption coefficient due to the localized levelsmeasured by CPM can have stable electrical characteristics.

Next, a method for manufacturing the transistor 250 is described withreference to FIGS. 5A to 5D and FIGS. 6A to 6D.

First, the substrate 100 is prepared. Next, the base insulating film 102is formed over the substrate 100. Then, an oxide film 203 a, an oxidesemiconductor film 203 b, and an oxide film 203 c are deposited in thisorder over the base insulating film 102 (see FIG. 5A).

Embodiment 1 can be referred to for materials and manufacturing methodsof the substrate 100 and the base insulating film 102. Theabove-described materials can be used for the oxide film 203 a, theoxide semiconductor film 203 b, and the oxide film 203 c; thedescription of the oxide semiconductor film 103 in Embodiment 1 can bereferred to for manufacturing methods of the oxide film 203 a, the oxidesemiconductor film 203 b, and the oxide film 203 c.

Subsequently, first heat treatment is preferably performed. The firstheat treatment can be performed at a temperature higher than or equal to250° C. and lower than or equal to 650° C., preferably higher than orequal to 300° C. and lower than or equal to 500° C. The first heattreatment is performed in an inert gas atmosphere, an atmospherecontaining an oxidizing gas at 10 ppm or more, preferably 1% or more, ormore preferably 10% or more, or under reduced pressure. Alternatively,the first heat treatment may be performed in such a manner that heattreatment is performed in an inert gas atmosphere, and then another heattreatment is performed in an atmosphere containing an oxidizing gas at10 ppm or more, preferably 1% or more, or more preferably 10% or more inorder to compensate desorbed oxygen. The first heat treatment enablesthe crystallinity of the multilayer film to be improved, and inaddition, impurities such as water, hydrogen, nitrogen, and carbon to beremoved from the gate insulating film to be formed later and themultilayer film.

Next, a hard mask 120 is deposited over the oxide film 203 c, an organiccoating film 122 is deposited over the hard mask 120, a resist is formedover the organic coating film 122. Then, the resist is exposed to anelectron beam, so that a resist mask 124 is formed (see FIG. 5B).

Alternatively, liquid immersion exposure in which ArF excimer laserlight is used as a light source or EUV exposure may be used for thelight exposure.

Embodiment 1 can be referred to for materials and manufacturing methodsof the hard mask 120, the organic coating film 122, and the resist mask124.

Next, the organic coating film 122 and the hard mask 120 are selectivelyetched with the use of the resist mask 124 as a mask, so that an organiccoating film 123 and a hard mask 121 are formed (see FIG. 5C).Embodiment 1 can be referred to for the etching conditions and the like.

Next, the oxide film 203 a, the oxide semiconductor film 203 b, and theoxide film 203 c are selectively etched with the use of the resist mask124 and the hard mask 121 as masks, so that an oxide film 204 a, anoxide semiconductor film 204 b, and an oxide film 204 c are formed (seeFIG. 5D).

Then, the hard mask 121, the organic coating film 123, and the resistmask 124 over the oxide film 204 c are removed (see FIG. 6A). There isno particular limitation on the removal treatment; for example, etching,ashing using oxygen plasma, or the like may be performed.

Alternatively, the following process may be employed. Before the oxidefilm 203 a, the oxide semiconductor film 203 b, and the oxide film 203 care etched, the organic coating film 123 and the resist mask 124 areremoved by ashing using oxygen plasma. After that, the oxide film 204 a,the oxide semiconductor film 204 b, and the oxide film 204 c are formedby etching the oxide film 203 a, the oxide semiconductor film 203 b, andthe oxide film 203 c and then the hard mask 121 is removed.

Next, a conductive film to be the source electrode 106 a and the drainelectrode 106 b is deposited over the base insulating film 102 and theoxide film 204 c and then part of the conductive film is processed toform the source electrode 106 a and the drain electrode 106 b (see FIG.6B). The edge portions of the source electrode 106 a and the drainelectrode 106 b are formed to have a step as shown in the drawings. Theedge portions can be formed in such a manner that a step of making aresist mask reduce by ashing and an etching step are alternatelyperformed a plurality of times.

For a conductive film to be the source electrode 106 a and the drainelectrode 106 b, a conductive material which is more likely to be bondedto oxygen than to a metal element included in the multilayer film isused. A material of the conductive film is a conductive material whichis likely to be bonded to oxygen; therefore, oxygen in the multilayerfilm is bonded to the conductive material (the conductive film). Thebonding causes oxygen vacancy in a region of the multilayer film in thevicinity of an interface with the conductive film. Alternatively, damage(oxygen vacancy) to the top surface of the multilayer film is causedwhen the conductive film to be formed over multilayer film is formed. Bythe oxygen vacancy, a low-resistance region 105 is formed. Although aboundary between the low-resistance region 105 and the multilayer filmexists in the oxide film 204 c, this embodiment is not limited thereto;the boundary may exist in the oxide film 204 a, in the oxidesemiconductor film 204 b, at the interface between the oxide film 204 aand the oxide semiconductor film 204 b, or at the interface between theoxide semiconductor film 204 b and the oxide film 204 c. Further, thelow-resistance region 105 exists in a region at a depth of greater than0 nm and less than or equal to 15 nm, preferably less than 10 nm,further preferably less than 3 nm from the interface between themultilayer film and the conductive film in the depth direction of themultilayer film.

When the low-resistance region 105 is formed, contact resistance betweenthe source electrode or the drain electrode to be formed later and themultilayer film can be reduced, so that high-speed operation of thetransistor 250 can be achieved.

Further, the step of making the resist mask reduce by ashing and theetching step are alternately performed, whereby the edge portions of thesource electrode 106 a and the drain electrode 106 b are provided over alow-resistance region 105 a and a low-resistance region 105 b to beformed later.

Therefore, the channel formation region of the transistor 250corresponds to a region B of the low-resistance region 105 which is notin contact with the source electrode 106 a and the drain electrode 106b. That is, the channel formation region consists of the region A of themultilayer film between the low-resistance region 105 a and thelow-resistance region 105 b and the regions A1. The channel formationregion of the transistor 250 is made to be an n-type; therefore, it isnecessary that the impurity concentration of the multilayer film isreduced so that the multilayer film is a highly purified to beintrinsic.

Next, the gate insulating film 108 is formed (see FIG. 6C). Embodiment 1can be referred to for a material and a manufacturing method of the gateinsulating film 108.

Next, oxygen is added to the channel formation region of the multilayerfilm, so that the low-resistance region 105 a and the low-resistanceregion 105 b are formed.

Embodiment 1 can be referred to for a method for adding oxygen to theregion B of the multilayer film.

Next, second heat treatment is preferably performed. The second heattreatment can be performed in a similar condition to the first heattreatment. By the second heat treatment, impurities such as hydrogen andwater can be further removed from the multilayer film.

Next, a conductive film to be the gate electrode 110 is deposited overthe gate insulating film 108 and then part of the conductive film isprocessed to form the gate electrode 110. Embodiment 1 can be referredto for a material and a manufacturing method of the gate electrode 110.

Next, the insulating film 112 is formed over the source electrode 106 a,the drain electrode 106 b, and the gate electrode 110 (see FIG. 6D).Embodiment 1 can be referred to for a material and a manufacturingmethod of the insulating film 112.

Next, third heat treatment is preferably performed. The third heattreatment can be performed under a condition similar to that of thefirst heat treatment. In the case where the base insulating film 102 andthe insulating film 112 contain excess oxygen, the excess oxygen iseasily released from the base insulating film 102 and the insulatingfilm 112 by the third heat treatment, so that oxygen vacancy in themultilayer film, particularly, the oxide semiconductor film 204 b, canbe reduced. Accordingly, the amount of oxygen vacancy in the channelformation region of the multilayer film can be further reduced, so thatthe channel formation region becomes a highly purified intrinsic region.

In this manner, the transistor 250 can be manufactured.

FIG. 7 illustrates another transistor structure. A transistor 260illustrated in FIG. 7 includes a base insulating film 102 over asubstrate 100, an oxide film 204 a over the base insulating film 102, anoxide semiconductor film 204 b over the oxide film 204 a, an oxidesemiconductor film 204 b over the oxide film 204 a, a source electrode106 a and a drain electrode 106 b which are in contact with the oxidesemiconductor film 204 b, an oxide film 204 c over the source electrode106 a and the drain electrode 106 b, a low-resistance region 105 a whichis formed because of extraction of oxygen from the oxide film 204 a andthe oxide semiconductor film 204 b which are in contact with the sourceelectrode 106 a, a low-resistance region 105 b which is formed becauseof extraction of oxygen from the oxide film 204 a and the oxidesemiconductor film 204 b which are in contact with the drain electrode106 b, a gate insulating film 108 over the oxide film 204 c, the sourceelectrode 106 a, and the drain electrode 106 b, and a gate electrode 110over the gate insulating film 108. In addition, an insulating film 112may be provided over the gate insulating film 108 and the gate electrode110. Note that the insulating film 112 is provided as needed and anotherinsulating film may be further provided thereover.

The transistor 250 illustrated in FIGS. 4A to 4C is the same as thetransistor 260 illustrated in FIG. 7 except that the oxide film 204 c isformed over the source electrode 106 a and the drain electrode 106 b.

In the transistor 260, the oxide semiconductor film 204 b in which thechannel is formed is in contact with the source electrode 106 a and thedrain electrode 106 b, so that oxygen vacancy is generated at a highdensity in the oxide semiconductor film 204 b and n-type regions (thelow-resistance region 105 a and the low-resistance region 105 b) areformed. Therefore, there is a few resistance components in a carrierpath and carriers can be transported efficiently.

Note that in this embodiment, a channel corresponds to a region of theoxide semiconductor film, which is between the source electrode and thedrain electrode. Further, a channel formation region corresponds toregions of the oxide film 204 a, the oxide semiconductor film 204 b, andthe oxide film 204 c, which are between the source electrode and thedrain electrode.

Further, the oxide film 204 c is formed after the source electrode 106 aand the drain electrode 106 b are formed; therefore, overetching of theoxide film 204 c does not occur at the time of forming the sourceelectrode 106 a and the drain electrode 106 b. Therefore, the oxidesemiconductor film 204 b where the channel is formed can be sufficientlyseparated from the gate insulating film 108, and the effect ofsuppressing influence of diffusion of impurities from the interface canbe enhanced.

Further, the oxide film 204 c functions as a barrier film whichsuppresses entry of hydrogen or a compound containing hydrogen (e.g.,water) from the outside to the oxide semiconductor film 204 b; thus, thereliability of the transistor can be improved.

By such a manufacturing method, when the oxide semiconductor film ismicrofabricated to have an island shape, unevenness of an end portion ofthe oxide semiconductor film can be suppressed. Accordingly, aminiaturized transistor having high electrical characteristics can beprovided in a high yield. Further, also in a semiconductor deviceincluding the transistor, high performance, high reliability, and highproductivity can be achieved.

This embodiment can be combined with any of the other embodiments inthis specification as appropriate.

Embodiment 3

In this embodiment, an example of a semiconductor device (memory device)which includes a transistor of one embodiment of the present invention,which can hold stored data even when not powered, and which has anunlimited number of write cycles is described with reference todrawings.

FIG. 8A is a cross-sectional view of the semiconductor device, and FIG.8B is a circuit diagram of the semiconductor device.

The semiconductor device illustrated in FIGS. 8A and 8B includes atransistor 400 including a first semiconductor material in a lowerportion, and a transistor 402 including a second semiconductor materialand a capacitor 404 in an upper portion. As the transistor 402, any ofthe transistors described in the above embodiments can be used, and anexample in which the transistor 150 described in Embodiment 1 withreference to FIGS. 1A and 1B is applied to the transistor 402 isdescribed in this embodiment. One electrode of the capacitor 404 isformed using the same material as a gate electrode of the transistor402, the other electrode of the capacitor 404 is formed using the samematerial as a source electrode and a drain electrode of the transistor402, and a dielectric of the capacitor 404 is formed using the samematerial as the gate insulating film 108 of the transistor 402; thus,the capacitor 404 can be formed at the same time as the transistor 402.

Here, the first semiconductor material and the second semiconductormaterial are preferably materials having different band gaps. Forexample, the first semiconductor material may be a semiconductormaterial (such as silicon) other than an oxide semiconductor, and thesecond semiconductor material may be the oxide semiconductor describedin Embodiment 1. A transistor including a material other than an oxidesemiconductor can operate at high speed easily. On the other hand, atransistor including an oxide semiconductor enables charge to be heldfor a long time owing to its electrical characteristics, that is, thelow off-state current.

Although all the above transistors are n-channel transistors here, it isneedless to say that p-channel transistors can be used. The specificstructure of the semiconductor device, such as the material used for thesemiconductor device and the structure of the semiconductor device, isnot necessarily limited to that described here except for the use of thetransistor described in the above embodiment, which is formed using anoxide semiconductor for storing data.

The transistor 400 in FIG. 8A includes a channel formation regionprovided in a substrate 410 including a semiconductor material (such ascrystalline silicon), impurity regions provided such that the channelformation region is sandwiched therebetween, intermetallic compoundregions provided in contact with the impurity regions, a gate insulatingfilm provided over the channel formation region, and a gate electrodeprovided over the gate insulating film. Note that a transistor whosesource electrode and drain electrode are not illustrated in a drawingmay also be referred to as a transistor for the sake of convenience.Further, in such a case, in description of a connection of a transistor,a source region and a source electrode may be collectively referred toas a source electrode, and a drain region and a drain electrode may becollectively referred to as a drain electrode. That is, for example, inthis specification, the term “source electrode” might include a sourceregion.

An element isolation insulating layer 406 is provided over the substrate410 so as to surround the transistor 400. An insulating film 420 isprovided so as to cover the transistor 400. Note that the elementisolation insulating layer 406 can be formed by an element isolationtechnique such as local oxidation of silicon (LOCOS) or shallow trenchisolation (STI).

For example, the transistor 400 formed using a crystalline siliconsubstrate can operate at high speed. Thus, when the transistor is usedas a reading transistor, data can be read at a high speed. As treatmentprior to formation of the transistor 402 and the capacitor 404, CMPtreatment is performed on the insulating film 420 covering thetransistor 400, whereby the insulating film 420 is planarized and, atthe same time, an upper surface of the gate electrode of the transistor400 is exposed.

The transistor 402 is provided over the insulating film 420, and one ofthe source electrode and the drain electrode thereof is extended so asto function as the other electrode of the capacitor 404.

The transistor 402 in FIG. 8A is a top-gate transistor in which achannel is formed in an oxide semiconductor film. Since the off-statecurrent of the transistor 402 is low, stored data can be held for a longperiod owing to such a transistor. In other words, power consumption canbe sufficiently reduced because a semiconductor device in which refreshoperation is unnecessary or the frequency of refresh operation isextremely low can be provided.

In the transistor 402, low-resistance regions are formed in regions inthe vicinity of the interfaces of the oxide semiconductor film incontact with the source electrode and the drain electrode, and thechannel formation region can be a highly purified intrinsic region byadding oxygen to the oxide semiconductor film using the source electrodeand the drain electrode as masks. By the addition of oxygen, the highlypurified intrinsic region and the low-resistance regions can be formedin a self-aligned manner. The amount of oxygen vacancy in the channelformation region in the oxide semiconductor film in the transistor canbe reduced and the electrical characteristics of the transistor arefavorable; therefore, it is possible to provide a highly reliablesemiconductor device.

The transistor 400 and the transistor 402 can be formed so as to overlapwith each other as illustrated in FIG. 8A, whereby the area occupied bythem can be reduced. Accordingly, the degree of integration of thesemiconductor device can be increased.

Next, an example of a circuit configuration corresponding to FIG. 8A isillustrated in FIG. 8B.

In FIG. 8B, a first wiring (1st Line) is electrically connected to asource electrode of the transistor 400. A second wiring (2nd Line) iselectrically connected to a drain electrode of the transistor 400. Athird wiring (3rd Line) and one of a source electrode and a drainelectrode of the transistor 402 are electrically connected to eachother, and a fourth wiring (4th Line) and a gate electrode of thetransistor 402 are electrically connected to each other. The gateelectrode of the transistor 400 and the other of the source electrodeand the drain electrode of the transistor 402 are electrically connectedto one electrode of the capacitor 404. A fifth wiring (5th Line) iselectrically connected to the other electrode of the capacitor 404.

The semiconductor device in FIG. 8B utilizes a characteristic in whichthe potential of the gate electrode of the transistor 400 can be held,and thus can write, hold, and read data as described below.

Writing and holding of data is described. First, the potential of thefourth wiring is set to a potential at which the transistor 402 is on,so that the transistor 402 is turned on. Accordingly, the potential ofthe third wiring is supplied to the gate electrode of the transistor 400and the capacitor 404. In other words, a predetermined charge issupplied to the gate electrode of the transistor 400 (i.e., writing ofdata). Here, charge for supplying either of two different potentiallevels (hereinafter referred to as a low-level charge and a high-levelcharge) is supplied. After that, the potential of the fourth wiring isset to a potential at which the transistor 402 is off, so that thetransistor 402 is turned off. Thus, the charge supplied to the gateelectrode of the transistor 400 is held (holding).

Since the off-state current of the transistor 402 is significantlysmall, the charge of the gate electrode of the transistor 400 is heldfor a long time.

Next, reading of data is described. By supplying an appropriatepotential (reading potential) to the fifth wiring with a predeterminedpotential (constant potential) supplied to the first wiring, thepotential of the second wiring varies depending on the amount of chargeheld in the gate electrode of the transistor 400. This is generallybecause, when the transistor 400 is an n-channel transistor, an apparentthreshold voltage V_(th) _(—) _(H) in the case where the high-levelcharge is supplied to the gate electrode of the transistor 400 is lowerthan an apparent threshold voltage V_(th) _(—) _(L) in the case wherethe low-level charge is supplied to the gate electrode of the transistor400. Here, the apparent threshold voltage refers to the potential of thefifth wiring, which is needed to turn on the transistor 400. Thus, thepotential of the fifth wiring is set to a potential V₀ that is betweenV_(th) _(—) _(H) and V_(th) _(—) _(L), whereby charge supplied to thegate electrode of the transistor 400 can be determined. For example, inthe case where the high-level charge is supplied in writing, when thepotential of the fifth wiring is set to V₀ (>V_(th) _(—) _(H)), thetransistor 400 is turned on. In the case where the low-level charge issupplied in writing, even when the potential of the fifth wiring is setto V₀ (<V_(th) _(—) _(L)), the transistor 400 remains in an off state.Therefore, the data held can be read by determining the potential of thesecond wiring.

Note that in the case where memory cells are arrayed to be used, onlydata of desired memory cells needs to be read. The fifth wiring in thecase where data is not read may be supplied with a potential at whichthe transistor 400 is turned off regardless of the state of the gateelectrode, that is, a potential lower than V_(th) _(—) _(H).Alternatively, the fifth wiring may be supplied with a potential atwhich the transistor 400 is turned on regardless of the state of thegate electrode, that is, a potential higher than V_(th) _(—) _(L).

When a transistor having a channel formation region formed using anoxide semiconductor and having extremely small off-state current isapplied to the semiconductor device in this embodiment, thesemiconductor device can store data for an extremely long period. Inother words, power consumption can be sufficiently reduced becauserefresh operation becomes unnecessary or the frequency of refreshoperation can be extremely low. Moreover, stored data can be held for along period even when power is not supplied (note that a potential ispreferably fixed).

Further, in the semiconductor device described in this embodiment, highvoltage is not needed for writing data and there is no problem ofdeterioration of elements. For example, unlike a conventionalnonvolatile memory, it is not necessary to inject and extract electronsinto and from a floating gate, and thus a problem such as deteriorationof a gate insulating film does not arise at all. That is, thesemiconductor device according to the disclosed invention does not havea limitation on the number of times data can be rewritten, which is aproblem of a conventional nonvolatile memory, and the reliabilitythereof is drastically improved. Furthermore, data is written dependingon the on state and the off state of the transistor, whereby high-speedoperation can be easily achieved.

As described above, a miniaturized and highly integrated semiconductordevice having favorable electrical characteristics and a method formanufacturing the semiconductor device can be provided.

This embodiment can be combined with any of the other embodiments inthis specification as appropriate.

Embodiment 4

In this embodiment, a semiconductor device including a transistor of oneembodiment of the present invention, which can hold stored data evenwhen not powered, which does not have a limitation on the number ofwrite cycles, and which has a structure different from that described inEmbodiment 3, is described.

FIG. 9A illustrates an example of a circuit configuration of asemiconductor device, and FIG. 9B is a conceptual diagram illustratingan example of a semiconductor device. As a transistor 562 included inthe semiconductor device, any of the transistors described in the aboveembodiments can be used. A capacitor 554 can be formed through the sameprocess and at the same time as the transistor 562 in a manner similarto that of the capacitor 404 described in Embodiment 3.

In the semiconductor device illustrated in FIG. 9A, a bit line BL iselectrically connected to a source electrode of the transistor 562, aword line WL is electrically connected to a gate electrode of thetransistor 562, and a drain electrode of the transistor 562 iselectrically connected to one terminal of the capacitor 554.

Next, writing and holding of data in the semiconductor device (a memorycell 550) illustrated in FIG. 9A is described.

First, the potential of the word line WL is set to a potential at whichthe transistor 562 is turned on, so that the transistor 562 is turnedon. Accordingly, the potential of the bit line BL is supplied to the oneterminal of the capacitor 554 (writing). After that, the potential ofthe word line WL is set to a potential at which the transistor 562 isturned off, so that the transistor 562 is turned off. Thus, thepotential at the one terminal of the capacitor 554 is held (holding).

The transistor 562 including an oxide semiconductor has a characteristicof a significantly small off-state current. For that reason, a potentialof the first terminal of the capacitor 554 (or a charge accumulated inthe capacitor 554) can be held for an extremely long period by turningoff the transistor 562.

Next, reading of data is described. When the field-effect transistor 562is turned on, the bit line BL which is in a floating state and thecapacitor 554 are electrically connected to each other, and the chargeis redistributed between the bit line BL and the capacitor 554. As aresult, the potential of the bit line BL is changed. The amount ofchange in potential of the bit line BL varies depending on the potentialof the first terminal of the capacitor 554 (or the charge accumulated inthe capacitor 554).

For example, the potential of the bit line BL after chargeredistribution is (C_(B)×V_(B0)+C×V)/(C_(B)+C), where V is the potentialof the first terminal of the capacitor 554, C is the capacitance of thecapacitor 554, C_(B) is the capacitance of the bit line BL (hereinafteralso referred to as bit line capacitance), and V_(B0) is the potentialof the bit line BL before the charge redistribution. Therefore, it canbe found that assuming that the memory cell 550 is in either of twostates in which the potentials of the first terminal of the capacitor554 are V₁ and V₀ (V₁>V₀), the potential of the bit line BL in the caseof holding the potential V₁ (=(C_(B)×V_(B0)+C×V₁)/(C_(B)+C)) is higherthan the potential of the bit line BL in the case of holding thepotential V₀ (=(C_(B)×V_(B0)+C×V₀)/(C_(B)+C)).

Then, by comparing the potential of the bit line BL with a predeterminedpotential, data can be read.

As described above, the semiconductor device illustrated in FIG. 9A canhold charge that is accumulated in the capacitor 554 for a long timebecause the off-state current of the transistor 562 is extremely low. Inother words, power consumption can be sufficiently reduced becauserefresh operation becomes unnecessary or the frequency of refreshoperation can be extremely low. Moreover, stored data can be stored fora long time even when power is not supplied.

Next, the semiconductor device illustrated in FIG. 9B is described.

The semiconductor device illustrated in FIG. 9B includes a memory cellarray 551 (memory cell arrays 551 a and 551 b) including the pluralityof memory cells 550 illustrated in FIG. 9A as memory circuits in theupper portion, and a peripheral circuit 553 in the lower portion, whichis necessary for operating the memory cell array 551. Note that theperipheral circuit 553 is electrically connected to the memory cellarrays 551.

It is preferable that a semiconductor material of the transistorprovided in the peripheral circuit 553 be different from that of thetransistor 562. For example, silicon, germanium, silicon germanium,silicon carbide, gallium arsenide, or the like can be used, and a singlecrystal semiconductor is preferably used. A transistor including such asemiconductor material can operate at sufficiently high speed. Thus, thetransistor enables a variety of circuits (e.g., a logic circuit and adriver circuit) which need to operate at high speed to be favorablyobtained.

Note that FIG. 9B illustrates, as an example, the semiconductor devicein which the memory cell array 551 has a stack of the memory cell array551 a and the memory cell array 551 b; however, the number of stackedmemory cell arrays is not limited to two. For the memory cell array 551,a stack of three or more memory cell arrays may be used, or only onememory cell array may be used.

The transistor 562 is formed using an oxide semiconductor, and any ofthe transistors described in the above embodiments can be used as thetransistor 562. Since the off-state current of the transistor includingan oxide semiconductor is small, stored data can be held for a longtime. In other words, the frequency of refresh operation can beextremely lowered, which leads to a sufficient reduction in powerconsumption.

A semiconductor device having a novel feature can be obtained by beingprovided with both a peripheral circuit including the transistorincluding a material other than an oxide semiconductor (in other words,a transistor capable of operating at sufficiently high speed) and amemory circuit including the transistor including an oxide semiconductor(in a broader sense, a transistor whose off-state current issufficiently small). In addition, with a structure where the peripheralcircuit and the memory circuit are stacked, the degree of integration ofthe semiconductor device can be increased.

As described above, a miniaturized and highly integrated semiconductordevice having favorable electrical characteristics can be provided.

This embodiment can be combined with any of the other embodiments inthis specification as appropriate.

Embodiment 5

In this embodiment, examples of electronic appliances which can use anyof the transistors described in the above embodiments are described.

The transistors described in the above embodiments can be applied to avariety of electronic appliances (including game machines) and electricappliances. Examples of the electronic appliances and electricappliances include display devices of televisions, monitors, and thelike, lighting devices, desktop personal computers and laptop personalcomputers, word processors, image reproduction devices which reproducestill images or moving images stored in recording media such as digitalversatile discs (DVDs), portable compact disc (CD) players, radioreceivers, tape recorders, headphone stereos, stereos, cordless phonehandsets, transceivers, mobile phones, car phones, portable gamemachines, calculators, portable information terminals, electronicnotebooks, e-book readers, electronic dictionary, electronictranslators, audio input devices, video cameras, digital still cameras,electric shavers, IC chips, high-frequency heating appliances such asmicrowave ovens, electric rice cookers, electric washing machines,electric vacuum cleaners, air-conditioning systems such as airconditioners, dishwashers, dish dryers, clothes dryers, futon dryers,electric refrigerators, electric freezers, electricrefrigerator-freezers, freezers for preserving DNA, radiation counters,and medical equipment such as dialyzers. In addition, the examplesinclude alarm devices such as smoke detectors, gas alarm devices, andsecurity alarm devices. Further, the examples also include industrialequipment such as guide lights, traffic lights, belt conveyors,elevators, escalators, industrial robots, and power storage systems. Inaddition, moving objects and the like driven by oil engines and electricmotors using power from non-aqueous secondary batteries, for example,electric vehicles (EV), hybrid electric vehicles (HEV) which includeboth an internal-combustion engine and a motor, plug-in hybrid electricvehicles (PHEV), tracked vehicles in which caterpillar tracks aresubstituted for wheels of these vehicles, motorized bicycles includingmotor-assisted bicycles, motorcycles, electric wheelchairs, golf carts,boats or ships, submarines, helicopters, aircrafts, rockets, artificialsatellites, space probes, planetary probes, spacecrafts, and the likecan be given. Specific examples of these electronic appliances areillustrated in FIG. 10, FIG. 11, FIGS. 12A to 12C, and FIGS. 13A to 13C.

First, as an example of the alarm device, a structure of a fire alarm isdescribed. A fire alarm in this specification refers to any device whichraises an alarm over fire occurrence instantly, and for example, aresidential fire alarm, an automatic fire alarm system, and a firedetector used for the automatic fire alarm system are included in itscategory.

An alarm device illustrated in FIG. 10 includes at least a microcomputer700. Here, the microcomputer 700 is provided in the alarm device. Themicrocomputer 700 includes a power gate controller 703 electricallyconnected to a high potential power supply line VDD, a power gate 704electrically connected to the high potential power supply line VDD andthe power gate controller 703, a central processing unit (CPU) 705electrically connected to the power gate 704, and a sensor portion 709electrically connected to the power gate 704 and the CPU 705. Further,the CPU 705 includes a volatile memory portion 706 and a nonvolatilememory portion 707.

The CPU 705 is electrically connected to a bus line 702 via an interface708. The interface 708 as well as the CPU 705 is electrically connectedto the power gate 704. As a bus standard of the interface 708, an I²Cbus can be used, for example. A light-emitting element 730 electricallyconnected to the power gate 704 through the interface 708 is provided inthe alarm device described in this embodiment.

The light-emitting element 730 is preferably an element which emitslight with high directivity, and for example, an organic EL element, aninorganic EL element, or a light-emitting diode (LED) can be used.

The power gate controller 703 includes a timer and controls the powergate 704 with the use of the timer. The power gate 704 allows or stopssupply of power from the high potential power supply line VDD to the CPU705, the sensor portion 709, and the interface 708, in accordance withthe control by the power gate controller 703. Here, as an example of thepower gate 704, a switching element such as a transistor can be given.

With the use of the power gate controller 703 and the power gate 704,power is supplied to the sensor portion 709, the CPU 705, and theinterface 708 in a period during which the amount of light is measured,and supply of power to the sensor portion 709, the CPU 705, and theinterface 708 can be stopped during an interval between measurementperiods. The alarm device operates in such a manner, whereby powerconsumption can be reduced compared with a case where power iscontinuously supplied to the above structures.

In the case where a transistor is used as the power gate 704, it ispreferable to use a transistor which has an extremely low off-statecurrent and is used for the nonvolatile memory portion 707, for example,a transistor including an oxide semiconductor. With the use of such atransistor, leakage current can be reduced when supply of power isstopped by the power gate 704, so that power consumption can be reduced.

A direct-current power source 701 may be provided in the alarm devicedescribed in this embodiment so that power is supplied from thedirect-current power source 701 to the high potential power supply lineVDD. An electrode of the direct-current power source 701 on a highpotential side is electrically connected to the high potential powersupply line VDD, and an electrode of the direct-current power source 701on a low potential side is electrically connected to a low potentialpower supply line VSS. The low potential power supply line (VSS) iselectrically connected to the microcomputer 700. Here, the highpotential power supply line VDD is supplied with a high potential H. Thelow potential power supply line VSS is supplied with a low potential L,e.g., a ground potential (GND).

In the case where a battery is used as the direct-current power source701, for example, a battery case including an electrode electricallyconnected to the high potential power supply line VDD, an electrodeelectrically connected to the low potential power supply line VSS, and ahousing which can hold the battery, is provided in a housing. Note thatthe alarm device described in this embodiment does not necessarilyinclude the direct-current power source 701 and may have, for example, astructure in which power is supplied from an alternate-current powersource provided outside the alarm device through a wiring.

As the above battery, a secondary battery such as a lithium ionsecondary battery (also called a lithium ion storage battery or alithium ion battery) can be used. Further, a solar battery is preferablyprovided to charge the secondary battery.

The sensor portion 709 measures a physical quantity relating to anabnormal situation and transmits a measurement value to the CPU 705. Thephysical quantity relating to an abnormal situation depends on the usageof the alarm device, and in an alarm device functioning as a fire alarm,a physical quantity relating to a fire is measured. Accordingly, thesensor portion 709 measures the amount of light as the physical quantityrelating to a fire and senses smoke.

The sensor portion 709 includes an optical sensor 711 electricallyconnected to the power gate 704, an amplifier 712 electrically connectedto the power gate 704, and an AD converter 713 electrically connected tothe power gate 704 and the CPU 705. The optical sensor 711, theamplifier 712, and the AD converter 713 which are provided in the sensorportion 709, and the light-emitting element 730 operate when the powergate 704 allows supply of power to the sensor portion 709.

FIG. 11 illustrates part of the cross section of the alarm system. Inthe alarm device, element isolation regions 803 are formed in a p-typesemiconductor substrate 801, and an n-channel transistor 870 including agate insulating film 807, a gate electrode 809, n-type impurity regions811 a and 811 b, an insulating film 815, and an insulating film 817 isformed. Here, the n-channel transistor 870 is formed using asemiconductor other than an oxide semiconductor, such as single crystalsilicon, so that the n-channel transistor 870 can operate atsufficiently high speed. Accordingly, a volatile memory portion of a CPUthat can achieve high-speed access can be formed.

In addition, contact plugs 819 a and 819 b are formed in openings whichare formed by partly etching the insulating films 815 and 817, and aninsulating film 821 having groove portions is formed over the insulatingfilm 817 and the contact plugs 819 a and 819 b.

Wirings 823 a and 823 b are formed in the groove portions of theinsulating film 821, and an insulating film 820 formed by a sputteringmethod, a CVD method, or the like is provided over the insulating film821 and the wirings 823 a and 823 b. An insulating film 822 having agroove portion is formed over the insulating film.

An insulating film 825 formed by a sputtering method, a CVD method, orthe like is provided over the insulating film 822, and a secondtransistor 880 and a photoelectric conversion element 890 are providedover the insulating film 825.

The second transistor 880 includes an oxide film 806 a; an oxidesemiconductor film 806 b; an oxide film 806 c; a low-resistance region805 a and a low-resistance region 805 b which are in contact with theoxide film 806 a, the oxide semiconductor film 806 b, and the oxide film806 c; a source electrode 816 a and a drain electrode 816 b which are incontact with the low-resistance region 805 a and the low-resistanceregion 805 b; a gate insulating film 812; a gate electrode 804; and anoxide insulating film 818. Moreover, an insulating film 845 which coversthe photoelectric conversion element 890 and the second transistor 880is formed, and a wiring 849 in contact with the drain electrode 816 b isformed over the insulating film 845. The wiring 849 functions as thenode which electrically connects a drain electrode of the secondtransistor 880 to the gate electrode 809 of the n-channel transistor870. Note that a cross section C-D in the drawing shows a cross sectionin the depth direction of the transistor 870 in the cross section A-B.

Here, the transistor 250 described in the above embodiment can be usedas the second transistor 880, and the oxide film 806 a, the oxidesemiconductor film 806 b, and the oxide film 806 c correspond to theoxide film 204 a, the oxide semiconductor film 204 b, and the oxide film204 c described in Embodiment 2, respectively. Moreover, the sourceelectrode 816 a and the drain electrode 816 b correspond to the sourceelectrode 106 a and the drain electrode 106 b described in Embodiment 1,respectively.

In the transistor 880, low-resistance regions are formed in regions inthe vicinity of the interfaces of the multilayer film in contact withthe source electrode and the drain electrode, and the channel formationregion can be a highly purified intrinsic region by adding oxygen to themultilayer film using the source electrode and the drain electrode asmasks. The amount of oxygen vacancy in the channel formation region inthe multilayer film in the transistor can be reduced and the electricalcharacteristics of the transistor are favorable; therefore, it ispossible to provide a highly reliable semiconductor device.

The optical sensor 711 includes the photoelectric conversion element890, a capacitor, a first transistor, the second transistor 880, a thirdtransistor, and the n-channel transistor 870. As the photoelectricconversion element 890, a photodiode can be used here, for example.

One of terminals of the photoelectric conversion element 890 iselectrically connected to the low potential power supply line VSS, andthe other of the terminals thereof is electrically connected to one ofthe source electrode 816 a and the drain electrode 816 b of the secondtransistor 880.

The gate electrode 804 of the second transistor 880 is supplied with anelectric charge accumulation control signal Tx, and the other of thesource electrode 816 a and the drain electrode 816 b of the secondtransistor 880 is electrically connected to one of a pair of electrodesof the capacitor, one of a source electrode and a drain electrode of thefirst transistor, and the gate electrode of the n-channel transistor 870(hereinafter the node is referred to as a node FD in some cases).

The other of the pair of electrodes of the capacitor is electricallyconnected to the low potential power supply line VSS. A gate electrodeof the first transistor is supplied with a reset signal Res, and theother of the source electrode and the drain electrode thereof iselectrically connected to the high potential power supply line VDD.

One of a source electrode and a drain electrode of the n-channeltransistor 870 is electrically connected to one of a source electrodeand a drain electrode of the third transistor and the amplifier 712. Theother of the source electrode and the drain electrode of the n-channeltransistor 870 is electrically connected to the high potential powersupply line VDD. A gate electrode of the third transistor is suppliedwith a bias signal Bias, and the other of the source electrode and thedrain electrode thereof is electrically connected to the low potentialpower supply line VSS.

Note that the capacitor is not necessarily provided. For example, in thecase where parasitic capacitance of the n-channel transistor 870 or thelike is sufficiently large, a structure without the capacitor may beemployed.

Further, as each of the first transistor and the second transistor 880,the transistor having an extremely low off-state current is preferablyused. As the transistor having an extremely low off-state current, atransistor including an oxide semiconductor is preferably used. Withsuch a structure, the potential of the node FD can be held for a longtime.

In the structure in FIG. 11, the photoelectric conversion element 890 iselectrically connected to the second transistor 880 and is provided overthe insulating film 825.

The photoelectric conversion element 890 includes a semiconductor film860 provided over the insulating film 825, and the source electrode 816a and an electrode 816 c which are in contact with a top surface of thesemiconductor film 860. The source electrode 816 a is an electrodefunctioning as the source electrode or the drain electrode of the secondtransistor 880 and electrically connects the photoelectric conversionelement 890 to the second transistor 880.

Over the semiconductor film 860, the source electrode 816 a, and theelectrode 816 c, the gate insulating film 812, the oxide insulating film818, and the insulating film 845 are provided. Further, a wiring 856 isformed over the insulating film 845 and is in contact with the electrode816 c through an opening provided in the gate insulating film 812, theoxide insulating film 818, and the insulating film 845.

The electrode 816 c can be formed in steps similar to those of thesource electrode 816 a and the drain electrode 816 b, and the wiring 856can be formed in steps similar to those of the wiring 849.

As the semiconductor film 860, a semiconductor film which can performphotoelectric conversion is provided, and for example, silicon orgermanium can be used. In the case of using silicon for thesemiconductor film 860, an optical sensor which senses visible light canbe obtained. Further, there is a difference, between silicon andgermanium, in wavelengths of electromagnetic waves that can be absorbed.When the semiconductor film 860 includes germanium, a sensor whichmainly senses an infrared ray can be obtained.

In the above manner, the sensor portion 709 including the optical sensor711 can be incorporated into the microcomputer 700, so that the numberof components can be reduced and the size of the housing of the alarmdevice can be reduced. Note that in the case where the place of theoptical sensor or the photoelectric conversion element needs a highdegree of freedom, the optical sensor or the photoelectric conversionelement may be externally provided so as to be electrically connected tothe microcomputer 700.

In the alarm device including the above-described IC chip, the CPU 705in which a plurality of circuits including any of the transistorsdescribed in the above embodiments are combined and mounted on one ICchip is used.

FIGS. 12A to 12C are block diagrams illustrating a specificconfiguration of a CPU at least partly including any of the transistorsdescribed in the above embodiments.

The CPU illustrated in FIG. 12A includes an arithmetic logic unit (ALU)921, an ALU controller 922, an instruction decoder 923, an interruptcontroller 924, a timing controller 925, a register 926, a registercontroller 927, a bus interface (Bus I/F) 928, a rewritable ROM 929, andan ROM interface (ROM I/F) 919 over a substrate 920. A semiconductorsubstrate, an SOI substrate, a glass substrate, or the like is used asthe substrate 920. The ROM 929 and the ROM interface 919 may be providedover a separate chip. It is needless to say that the CPU illustrated inFIG. 12A is only an example in which the configuration is simplified,and actual CPUs have various configurations depending on applications.

An instruction that is input to the CPU through the bus interface 928 isinput to the instruction decoder 923 and decoded therein, and then,input to the ALU controller 922, the interrupt controller 924, theregister controller 927, and the timing controller 925.

The ALU controller 922, the interrupt controller 924, the registercontroller 927, and the timing controller 925 conduct various controlsin accordance with the decoded instruction. Specifically, the ALUcontroller 922 generates signals for controlling the operation of theALU 921. While the CPU is executing a program, the interrupt controller924 determines an interrupt request from an external input/output deviceor a peripheral circuit on the basis of its priority or a mask state,and processes the request. The register controller 927 generates anaddress of the register 926, and reads/writes data from/to the register926 in accordance with the state of the CPU.

The timing controller 925 generates signals for controlling operationtimings of the ALU 921, the ALU controller 922, the instruction decoder923, the interrupt controller 924, and the register controller 927. Forexample, the timing controller 925 includes an internal clock generatorfor generating an internal clock signal CLK2 based on a reference clocksignal CLK1, and supplies the internal clock signal CLK2 to the abovecircuits.

In the CPU illustrated in FIG. 12A, a memory cell is provided in theregister 926. As the memory cell of the register 926, any of thetransistors described in the above embodiments can be used.

In the CPU illustrated in FIG. 12A, the register controller 927 selectsoperation of storing data in the register 926 in accordance with aninstruction from the ALU 921. That is, the register controller 927selects whether data is stored by a flip-flop or by a capacitor in thememory cell included in the register 926. When data storing by theflip-flop is selected, a power supply voltage is supplied to the memorycell in the register 926. When data storing by the capacitor isselected, the data is rewritten in the capacitor, and supply of powersupply voltage to the memory cell in the register 926 can be stopped.

The power supply can be stopped by a switching element provided betweena memory cell group and a node to which a power supply potential VDD ora power supply potential VSS is supplied, as illustrated in FIG. 12B orFIG. 12C. Circuits illustrated in FIGS. 12B and 12C are be describedbelow.

FIGS. 12B and 12C each illustrate an example of the configuration of amemory circuit in which any of the transistors described in the aboveembodiments is used as a switching element which controls supply of apower supply potential to a memory cell.

The memory device illustrated in FIG. 12B includes a switching element901 and a memory cell group 903 including a plurality of memory cells902. Specifically, as each of the memory cells 902, any of thetransistors described in the above embodiments can be used. Each of thememory cells 902 included in the memory cell group 903 is supplied withthe high-level power supply potential VDD via the switching element 901.Further, each of the memory cells 902 included in the memory cell group903 is supplied with a potential of a signal IN and the low-level powersupply potential VSS.

In FIG. 12B, any of the transistors described in the above embodimentsis used as the switching element 901, and the switching of thetransistor is controlled by a signal SigA supplied to a gate electrodethereof.

Note that FIG. 12B illustrates the structure in which the switchingelement 901 includes only one transistor; however, one embodiment of thepresent invention is not limited thereto and the switching element 901may include a plurality of transistors. In the case where the switchingelement 901 includes a plurality of transistors which function asswitching elements, the plurality of transistors may be connected toeach other in parallel, in series, or in combination of parallelconnection and series connection.

Although the switching element 901 controls the supply of the high-levelpower supply potential VDD to each of the memory cells 902 included inthe memory cell group 903 in FIG. 12B, the switching element 901 maycontrol the supply of the low-level power supply potential VSS.

In FIG. 12C, an example of a memory device in which each of the memorycells 902 included in the memory cell group 903 is supplied with thelow-level power supply potential VSS via the switching element 901 isillustrated. The supply of the low-level power supply potential VSS toeach of the memory cells 902 included in the memory cell group 903 canbe controlled by the switching element 901.

When a switching element is provided between a memory cell group and anode to which the power supply potential VDD or the power supplypotential VSS is supplied, data can be held even in the case where anoperation of a CPU is temporarily stopped and the supply of the powersupply voltage is stopped; accordingly, power consumption can bereduced. Specifically, for example, while a user of a personal computerdoes not input data to an input device such as a keyboard, the operationof the CPU can be stopped, so that the power consumption can be reduced.

Although the CPU is given as an example, the transistor can also beapplied to an LSI such as a digital signal processor (DSP), a customLSI, or a field programmable gate array (FPGA).

In FIG. 13A, a display device 1000 is an example of an electricappliance including the CPU in which any of the transistors described inthe above embodiments is used. The display device 1000 corresponds to adisplay device for TV broadcast reception and includes a housing 1001, adisplay portion 1002, speaker portions 1003, a CPU 1004, and the like.The CPU 1004 is provided in the housing 1001. The display device 1000can receive electric power from a commercial power supply.Alternatively, the display device 1000 can use electric power stored ina power storage device. When any of the transistors described in theabove embodiments is used as the CPU in the display device 1000, areduction in power consumption of the display device 1000 can beachieved.

A semiconductor display device such as a liquid crystal display device,a light-emitting device in which a light-emitting element such as anorganic EL element is provided in each pixel, an electrophoresis displaydevice, a digital micromirror device (DMD), a plasma display panel(PDP), a field emission display (FED), and the like can be used in thedisplay portion 1002.

Note that the display device includes, in its category, all ofinformation display devices for personal computers, advertisementdisplays, and the like besides TV broadcast reception.

In FIG. 13A, an alarm device 1010 is a residential fire alarm, whichincludes a sensor portion and a microcomputer 1011. Note that themicrocomputer 1011 is an example of an electric appliance including theCPU in which any of the transistors described in the above embodimentsis used.

In FIG. 13A, an air conditioner which includes an indoor unit 1020 andan outdoor unit 1024 is an example of an electric appliance includingthe CPU in which any of the transistors described in the aboveembodiments is used. Specifically, the indoor unit 1020 includes ahousing 1021, an air outlet 1022, a CPU 1023, and the like. Although theCPU 1023 is provided in the indoor unit 1020 in FIG. 13A, the CPU 1023may be provided in the outdoor unit 1024. Alternatively, the CPU 1023may be provided in both the indoor unit 1020 and the outdoor unit 1024.By using any of the transistors described in the above embodiments forthe CPU in the air conditioner, a reduction in power consumption of theair conditioner can be achieved.

In FIG. 13A, an electric refrigerator-freezer 1030 is an example of anelectric appliance including the CPU in which any of the transistorsdescribed in the above embodiments is used. Specifically, the electricrefrigerator-freezer 1030 includes a housing 1031, a door for arefrigerator 1032, a door for a freezer 1033, a CPU 1034, and the like.In FIG. 13A, the CPU 1034 is provided in the housing 1031. When any ofthe transistors described in the above embodiments is used as the CPU1034 of the electric refrigerator-freezer 1030, a reduction in powerconsumption of the electric refrigerator-freezer 1030 can be achieved.

FIG. 13B illustrates an example of an electric vehicle which is anexample of an electric appliance. An electric vehicle 1040 is equippedwith a secondary battery 1041. The output of the electric power of thesecondary battery 1041 is adjusted by a control circuit 1042 and theelectric power is supplied to a driving device 1043. The control circuit1042 is controlled by a processing unit 1044 including a ROM, a RAM, aCPU, or the like which is not illustrated. When any of the transistorsdescribed in the above embodiments is used as the CPU in the electricvehicle 1040, a reduction in power consumption of the electric vehicle1040 can be achieved.

The driving device 1043 includes a DC motor or an AC motor either aloneor in combination with an internal-combustion engine. The processingunit 1044 outputs a control signal to the control circuit 1042 based oninput data such as data of operation (e.g., acceleration, deceleration,or stop) by a driver or data during driving (e.g., data on an upgrade ora downgrade, or data on a load on a driving wheel) of the electricvehicle 1040. The control circuit 1042 adjusts the electric energysupplied from the secondary battery 1041 in accordance with the controlsignal of the processing unit 1044 to control the output of the drivingdevice 1043. In the case where the AC motor is mounted, although notillustrated, an inverter which converts direct current into alternatecurrent is also incorporated.

This embodiment can be combined with any of the other embodiments inthis specification as appropriate.

Example 1

In this example, an observation result of a surface of an oxidesemiconductor film processed using a hard mask is described. A methodfor fabricating an example sample is described.

First, a thermal oxidation film and a silicon oxide film were depositedover a silicon wafer as base insulating films. A sputtering method wasused in the deposition of the silicon oxide film. The thermal oxidationfilm was deposited to a thickness of 100 nm at 950° C. in an oxygenatmosphere containing HCl at 3%. Next, a 300-nm-thick silicon oxide filmwas deposited over the thermal oxidation film by a sputtering method.The silicon oxide film was deposited in the following manner: siliconoxide was used as a sputtering target, oxygen was supplied to atreatment chamber of a sputtering apparatus as a sputtering gas at aflow rate of 50 sccm, the pressure in the treatment chamber wascontrolled to 0.4 Pa, and an RF power of 1.5 kW was supplied. Note thatthe substrate temperature in the deposition of the silicon oxide filmwas set at 100° C.

Next, an oxide film was formed over the silicon oxide film. A20-nm-thick In—Ga—Zn oxide film having an atomic ratio of In:Ga:Zn=1:3:2was deposited as the oxide film. The In—Ga—Zn oxide film was depositedunder the following conditions: a sputtering target having an atomicratio of In:Ga:Zn=1:3:2 was used; argon and oxygen were supplied to atreatment chamber of a sputtering apparatus as a sputtering gas at flowrates of 30 sccm and 15 sccm, respectively; the pressure in thetreatment chamber was controlled to 0.4 Pa; and a DC power of 0.5 kW wassupplied. Note that the substrate temperature in the deposition of theIn—Ga—Zn oxide film was set at 200° C.

Next, a 15-nm-thick In—Ga—Zn oxide film having an atomic ratio ofIn:Ga:Zn=1:1:1 was deposited as an oxide semiconductor film over theoxide film. The In—Ga—Zn oxide film was deposited under the followingconditions: a sputtering target having an atomic ratio of In:Ga:Zn=1:1:1was used; argon and oxygen were supplied to a treatment chamber of asputtering apparatus as a sputtering gas at flow rates of 30 sccm and 15sccm, respectively; the pressure in the treatment chamber was controlledto 0.4 Pa; and a DC power of 0.5 kW was supplied. Note that thesubstrate temperature in the deposition of the In—Ga—Zn oxide film wasset at 300° C.

Next, a 5-nm-thick tungsten film was deposited as a hard mask over theoxide semiconductor film. The tungsten film was deposited under thefollowing conditions: argon and heated argon were supplied to atreatment chamber of a sputtering apparatus as a sputtering gas at flowrates of 80 sccm and 10 sccm, respectively; the pressure in thetreatment chamber was controlled to 0.8 Pa; and a DC power of 1.0 kW wassupplied. Note that the substrate temperature in the deposition of thetungsten film was set at 200° C.

Next, as an organic coating film, SWK-T7 (manufactured by TOKYO OHKAKOGYO CO., LTD) was applied to have a thickness of 20 nm to the tungstenfilm serving as the hard mask. Moisture had been removed by heating at200° C. for 120 seconds before the application of SWK-T7 (manufacturedby TOKYO OHKA KOGYO CO., LTD). Subsequently,1,1,1,3,3,3-hexamethyldisilazane (HMDS) was further applied to SWK-T7and then moisture was removed by heating at 110° C. for 60 seconds.Then, a solvent and moisture were removed by heating at 200° C. for 200seconds.

Next, a resist was formed over the organic coating film. As the resist,a negative resist OEBR-CAN034A2 (manufactured by TOKYO OHKA KOGYO CO.,LTD) was deposited to have a thickness of 100 nm. Moisture had beenremoved by heating at 200° C. for 120 seconds before OEBR-CAN034A2(manufactured by TOKYO OHKA KOGYO CO., LTD) was deposited. Subsequently,HMDS was further applied to OEBR-CAN034A2 and then moisture was removedby heating at 110° C. for 60 seconds. Then, a solvent and moisture wereremoved by heating at 100° C. for 100 seconds.

Next, a resist mask was formed through light exposure and development.Multiple light exposure was performed by an electron beam exposureapparatus and the amount of light exposure was 80 μC/cm² to 160 μC/cm²(preferably 130 μC/cm² to 155 μC/cm²). After the light exposure, postexposure bake (PEB) was performed at 100° C. for 100 seconds. Thedevelopment was performed under the following conditions: NMD-3(manufactured by TOKYO OHKA KOGYO CO., LTD) was used as a developer andthe development time was 60 seconds. In such a manner, the resist maskwas formed.

Next, the organic coating film and the hard mask were etched using theresist mask as a mask. The etching conditions were set as follows.First, CF₄ with a flow rate of 100 sccm was used as the etching gas, thebias power was 50 W, the power of the ICP power source was 2000 W, andthe pressure was 0.67 Pa; then, a mixed gas of CF₄ and O₂ at a flow rateratio of CF₄:O₂=60 sccm:40 sccm was used as the etching gas, the biaspower was 25 W, the power of the ICP power source was 1000 W, and thepressure was 2.0 Pa.

Then, the resist mask and the organic coating film were removed byashing using oxygen plasma. The ashing conditions were as follows: theflow rate of oxygen was 100 sccm, the power of the power source was 200W, the pressure was 500 mTorr, and the ashing time was 120 seconds.

Next, the oxide semiconductor film and the oxide film were etched usingthe hard mask as a mask. The etching conditions were as follows: a mixedgas of CH₄ and Ar at a flow rate ratio of CH₄:Ar=16 sccm:32 sccm wasused as the etching gas, the bias power was 100 W, the power of the ICPpower source was 600 W, and the pressure was 1.0 Pa.

Next, the hard mask was etched to be removed. The etching conditionswere as follows: a mixed gas of CF₄ and O₂ at a flow rate ratio ofCF₄:O₂=60 sccm:40 sccm was used as the etching gas, the bias power was1000 W, the power of the ICP power source was 25 W, and the pressure was2.0 Pa.

In this manner, the example sample was fabricated. Further, acomparative sample was also fabricated without using a hard mask and anorganic coating film.

Then, a surface of each sample was observed with a scanning electronmicroscope (SEM). FIGS. 14A and 14B show SEM images of the samples.

FIG. 14A shows the SEM image of the example sample and FIG. 14B showsthe SEM image of the comparative sample.

The line width showed in FIG. 14A was measured and then variations inthe line width were calculated. As a result, a difference in the widthof the oxide semiconductor film between the widest portion and thenarrowest portion of was 2.93 nm when seen from the surface. Further,the standard deviation of line edge roughness on the left side of theSEM image was 3.92 nm and the standard deviation of line edge roughnesson the right side of the SEM image was 3.73 nm. Furthermore, thestandard deviation of line edge roughness in the case where the linewidth was measured in 32 points was 2.81 nm.

The line width showed in FIG. 14B was measured and then variations inthe line width were calculated. As a result, a difference in the widthof the oxide semiconductor film between the widest portion and thenarrowest portion of was 27.95 nm when seen from the surface. Further,the standard deviation of line edge roughness on the left side of theSEM image was 9.26 nm and the standard deviation of line edge roughnesson the right side of the SEM image was 13.98 nm. Furthermore, thestandard deviation of line edge roughness in the case where the linewidth was measured in 32 points was 19.97 nm.

Thus, it was confirmed that the oxide semiconductor film processed usingthe hard mask and the organic coating film has less and smallerunevenness at an end portion than the oxide semiconductor filmfabricated without using the hard mask and the organic coating film has.Further, it was confirmed that variations in the line width of the oxidesemiconductor film processed using the hard mask and the organic coatingfilm are smaller than those in the line width of the oxide semiconductorfilm fabricated without using the hard mask and the organic coatingfilm.

This application is based on Japanese Patent Application serial no.2013-016182 filed with Japan Patent Office on Jan. 30, 2013, the entirecontents of which are hereby incorporated by reference.

What is claimed is:
 1. A method for manufacturing a semiconductordevice, comprising the steps of: forming an oxide semiconductor filmover an insulating surface; forming a hard mask over the oxidesemiconductor film, the hard mask containing at least one of Ti, Mo, Ta,and W; forming a resist over the hard mask; performing light exposure toform a resist mask; processing the hard mask using the resist mask toform a processed hard mask; processing the oxide semiconductor filmusing the processed hard mask; removing the resist mask and theprocessed hard mask; forming a source electrode and a drain electrode incontact with the oxide semiconductor film; forming a gate insulatingfilm over the source electrode and the drain electrode; and forming agate electrode over the gate insulating film, the gate electrodeoverlapping with the oxide semiconductor film.
 2. The method formanufacturing a semiconductor device according to claim 1, wherein thelight exposure is an electron beam exposure.
 3. The method formanufacturing a semiconductor device according to claim 1, wherein thelight exposure is a liquid immersion exposure.
 4. A method formanufacturing a semiconductor device, comprising the steps of: formingan oxide semiconductor film over an insulating surface; forming a hardmask over the oxide semiconductor film; forming an organic coating filmover the hard mask; forming a resist over the organic coating film;performing light exposure to form a resist mask; processing the organiccoating film and the hard mask using the resist mask to form a processedhard mask; processing the oxide semiconductor film using the processedhard mask; removing the resist mask, the organic coating film, and theprocessed hard mask; forming a source electrode and a drain electrode incontact with the oxide semiconductor film; forming a gate insulatingfilm over the source electrode and the drain electrode; and forming agate electrode over the gate insulating film, the gate electrodeoverlapping with the oxide semiconductor film.
 5. The method formanufacturing a semiconductor device according to claim 2, wherein thelight exposure is an electron beam exposure.
 6. The method formanufacturing a semiconductor device according to claim 4, wherein thelight exposure is a liquid immersion exposure.
 7. The method formanufacturing a semiconductor device according to claim 4, wherein thehard mask contains at least one of Ti, Mo, Ta, and W.
 8. A semiconductordevice comprising: an oxide semiconductor film over an insulatingsurface; a source electrode and a drain electrode in contact with theoxide semiconductor film; a gate insulating film over the sourceelectrode and the drain electrode; a gate electrode over the gateinsulating film, the gate electrode overlapping with the oxidesemiconductor film; and a first oxide film and a second oxide filmbetween which the oxide semiconductor film is positioned, wherein thefirst oxide film and the second oxide film each contain at least one ofIn and Ga, wherein an energy of a bottom of a conduction band in each ofthe first oxide film and the second oxide film is closer to a vacuumlevel than an energy of a bottom of a conduction band in the oxidesemiconductor film by 0.05 eV or higher and 2 eV or lower, wherein adistance between the source electrode and the drain electrode is greaterthan or equal to 1 nm and less than or equal to 30 nm, and wherein astandard deviation of line edge roughness of the oxide semiconductorfilm is less than or equal to 4 nm.
 9. The semiconductor deviceaccording to claim 8, further comprising: a first low-resistance regionbetween the oxide semiconductor film and the source electrode; and asecond low-resistance region between the oxide semiconductor film andthe drain electrode.